Yadav Kavita, Tanaka Yuya, Ang Artoni Kevin R, Hirose Kotaro, Adachi Masahiro, Matsunami Masaharu, Takeuchi Tsunehiro
Toyota Technological Institute, Hisakata 2-12-1, Tempaku, Nagoya 468-8511, Japan.
MIRAI, Japan Science and Technology Agency, Tokyo 102-0076, Japan.
ACS Appl Mater Interfaces. 2024 Sep 25;16(38):50576-50586. doi: 10.1021/acsami.4c06329. Epub 2024 Sep 14.
We investigated the thermoelectric and thermal behavior of Fe-V-W-Al-based thin films prepared using the radio frequency magnetron sputtering technique at different oxygen pressures (0.1-1.0 × 10 Pa) and on different substrates (n, p, and undoped Si). Interestingly, at lower oxygen pressure, formation of a bcc-type Heusler structure was observed in deposited samples, whereas at higher oxygen pressure, we have noted the development of an amorphous structure in these samples. Our findings indicate that the moderately oxidized Fe-V-W-Al amorphous thin film deposited on the -Si substrate possesses a large magnitude of ∼ -1098 ± 100 μV K near room temperature, which is almost double the previously reported value for thin films. Additionally, the power factor (PF) indicated an enormously large value of ∼33.9 mW m K near 320 K. The thermal conductivity of the amorphous thin film is also found to be 2.75 Wm K, which is quite lower compared to bulk alloys. As a result, the maximum figure of merit is estimated to be extremely high, i.e., ∼3.9 near 320 K, which is among one of the highest reported values so far. The anomalously large value of Seebeck coefficient and PF has been ascribed to the unusual composite effect of the metallic amorphous oxide phase and insulating substrate possessing a large Seebeck coefficient.
我们研究了采用射频磁控溅射技术在不同氧压(0.1 - 1.0×10 Pa)下以及在不同衬底(n型、p型和未掺杂的硅)上制备的Fe-V-W-Al基薄膜的热电和热行为。有趣的是,在较低氧压下,在沉积样品中观察到形成了体心立方(bcc)型赫斯勒结构,而在较高氧压下,我们注意到这些样品中出现了非晶结构。我们的研究结果表明,沉积在 -Si衬底上的适度氧化的Fe-V-W-Al非晶薄膜在室温附近具有约 -1098±100 μV K的大数值,这几乎是先前报道的薄膜值的两倍。此外,功率因子(PF)在320 K附近显示出约33.9 mW m K的极大值。还发现非晶薄膜的热导率为2.75 Wm K,与块状合金相比相当低。因此,估计最大品质因数极高,即在320 K附近约为3.9,这是迄今为止报道的最高值之一。塞贝克系数和PF的异常大值归因于金属非晶氧化物相和具有大塞贝克系数的绝缘衬底的异常复合效应。