Park Eui Keun, Jang Hwan-Yoon, Jeon Seo-Yeon, Raju Kati, Lee Hyun-Kwuon
School of Advanced Materials Science and Engineering, Kumoh National Institute of Technology, Gumi 39177, Republic of Korea.
Materials (Basel). 2024 Sep 18;17(18):4585. doi: 10.3390/ma17184585.
This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed a dense microstructure with a polycrystalline structure predominantly composed of YAlO (YAG) phase and a minor phase of YSiO. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent CF/Ar/O plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments.
本研究调查了涂覆在氧化铝陶瓷上的Y-Al-Si-O（YAS）玻璃陶瓷的制备、微观结构特征及抗等离子体性能。YAS玻璃料最初采用熔融淬火法制备，然后进行均匀研磨并涂覆在氧化铝陶瓷上。熔覆过程在1650℃下进行1小时。使用X射线衍射、扫描电子显微镜和能量色散X射线光谱对玻璃料和涂层的成分及微观结构进行了全面表征。这些分析揭示了一种致密的微观结构，其多晶结构主要由YAlO（YAG）相和少量的YSio相组成。氧化铝上的YAS涂层显示出致密层，与基体具有很强的附着力。随后，对涂层进行1小时的CF/Ar/O等离子体处理。等离子体暴露测试表明，与未涂覆的氧化铝相比，涂覆YAS的氧化铝表现出明显更好的抗蚀刻性能，在YAS涂层上观察到的表面损伤最小，证实了其对等离子体的保护性能。YAS涂层优异的抗等离子体性能归因于其YAG相占主导地位。本研究为在苛刻的等离子体环境中保护陶瓷提供了一种更稳定且成本效益更高的解决方案。
