Zheng Laifang, Zhang Junsheng, Wang Huajie, Liu Jijun
Department of Electronic Engineering, Taiyuan Institute of Technology, Taiyuan, 030008, China.
Sci Rep. 2024 Oct 7;14(1):23346. doi: 10.1038/s41598-024-74334-3.
This study introduces a novel graphene RF NEMS capacitive switch and conducts an extensive analysis of its RF performance using CST and COMSOL Multiphysics software. The switch's characteristic impedance matching is accomplished through a coplanar waveguide (CPW) structure, incorporating a dielectric layer topped with conductive graphene beam electrodes. Simulation results reveal that the monolayer graphene RF NEMS switch maintains an insertion loss of 0.003 ~ 0.015 dB and an isolation greater than 40 dB across an ultra-wideband (UWB) frequency range of DC ~ 140 GHz. Moreover, the switch demonstrates a switching time of 4.03 ps at a pull-in voltage of 1 V. The performance of multilayer graphene RF NEMS switches was also evaluated. The study further investigates the operational mechanism of the graphene RF NEMS switch and performs finite element analysis on the proposed design. The graphene RF NEMS switch discussed herein offers significant advantages, including minimal size, lightweight, cost-effectiveness, low pull-in voltage, rapid response time, excellent RF performance, and reduced space consumption in circuitry. Its potential applications span a range from L to F bands, encompassing data storage, communication systems, sensors, remote sensing and military uses.
本研究介绍了一种新型的石墨烯射频纳米机电系统(RF NEMS)电容式开关,并使用CST和COMSOL Multiphysics软件对其射频性能进行了广泛分析。该开关的特性阻抗匹配通过共面波导(CPW)结构实现,该结构包含一个覆盖有导电石墨烯梁电极的介电层。仿真结果表明,单层石墨烯射频纳米机电系统开关在直流至140GHz的超宽带(UWB)频率范围内保持0.003~0.015dB的插入损耗和大于40dB的隔离度。此外,该开关在1V的吸合电压下显示出4.03ps的开关时间。还评估了多层石墨烯射频纳米机电系统开关的性能。该研究进一步研究了石墨烯射频纳米机电系统开关的工作机制,并对所提出的设计进行了有限元分析。本文讨论的石墨烯射频纳米机电系统开关具有显著优势,包括尺寸极小、重量轻、成本效益高、吸合电压低、响应时间快、射频性能优异以及减少电路中的空间消耗。其潜在应用范围从L波段到F波段,涵盖数据存储、通信系统、传感器、遥感和军事用途。