Huang Pengcheng, Wu Peijin, Guo Ziyuan, Ye Zhicheng
Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Key Laboratory for Laser Plasmas (Ministry of Education), School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China.
Micromachines (Basel). 2024 Sep 30;15(10):1219. doi: 10.3390/mi15101219.
High-precision, ultra-thin angular detectable imaging upon a single pixel holds significant promise for light-field detection and reconstruction, thereby catalyzing advancements in machine vision and interaction technology. Traditional light-direction angle sensors relying on optical components like gratings and lenses face inherent constraints from diffraction limits in achieving device miniaturization. Recently, angle sensors via coupled double nanowires have demonstrated prowess in attaining high-precision angle perception of incident light at sub-wavelength device scales, which may herald a novel design paradigm for ultra-compact angle sensors. However, the current approach to measuring the three-dimensional (3D) incident light direction is unstable. In this paper, we propose a sensor concept capable of discerning the 3D light-direction based on a segmented concentric nanoring structure that is sensitive to both elevation angle (θ) and azimuth angle (ϕ) at a micrometer device scale and is validated through simulations. Through deep learning (DL) analysis and prediction, our simulations reveal that for angle scanning with a step size of 1°, the device can still achieve a detection range of 0∼360° for ϕ and 45°∼90° for θ, with an average accuracy of 0.19°, and DL can further solve some data aliasing problems to expand the sensing range. Our design broadens the angle sensing dimension based on mutual resonance coupling among nanoring segments, and through waveguide implementation or sensor array arrangements, the detection range can be flexibly adjusted to accommodate diverse application scenarios.
单像素上的高精度超薄角度可检测成像在光场检测和重建方面具有重大前景,从而推动机器视觉和交互技术的发展。传统的依赖光栅和透镜等光学元件的光方向角度传感器在实现设备小型化时面临衍射极限带来的固有限制。最近,通过耦合双纳米线的角度传感器在亚波长设备尺度上实现对入射光的高精度角度感知方面展现出优势,这可能预示着超紧凑型角度传感器的一种新设计范式。然而,当前测量三维(3D)入射光方向的方法并不稳定。在本文中,我们提出一种基于分段同心纳米环结构的能够辨别3D光方向的传感器概念,该结构在微米级设备尺度上对仰角(θ)和方位角(ϕ)均敏感,并通过模拟进行了验证。通过深度学习(DL)分析和预测,我们的模拟结果表明,对于步长为1°的角度扫描,该设备在ϕ方向上仍可实现0∼360°的检测范围,在θ方向上为45°∼90°,平均精度为0.19°,并且DL可以进一步解决一些数据混叠问题以扩大传感范围。我们的设计基于纳米环段之间的相互共振耦合拓宽了角度传感维度,并且通过波导实现或传感器阵列布置,可以灵活调整检测范围以适应各种应用场景。