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用于提高性能和实现小型化的42°Y-X钽酸锂/二氧化硅/多晶硅/硅衬底上的蜂窝状声子晶体

Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO/SiO/Poly-Si/Si Substrate for Improved Performance and Miniaturization.

作者信息

Tang Panliang, Pan Hongzhi, Workie Temesgen Bailie, Mi Jia, Bao Jingfu, Hashimoto Ken-Ya

机构信息

School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, No. 2006, Xiyuan Avenu, West Hi-Tech Zone, Chengdu 611731, China.

CETC No. 26 Research Institute, 14#Huayuan Road, Nanping, Nanan District, Chongqing 400060, China.

出版信息

Micromachines (Basel). 2024 Oct 14;15(10):1256. doi: 10.3390/mi15101256.

DOI:10.3390/mi15101256
PMID:39459130
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509270/
Abstract

A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In this paper, a honeycomb-shaped phononic crystal structure based on 42°Y-X LT/SiO/poly-Si/Si-layered substrate is proposed. The analysis of the bandgap distribution under various filling fractions was carried out using dispersion and transmission characteristics. In order to study the application of PnCs in SAW devices, one-port resonators with different reflectors were compared and analyzed. Based on the frequency response curves and Bode-Q value curves, it was found that when the HC-PnC structure is used as a reflector, it can not only improve the transmission loss of the resonator but also reduce the size of the device.

摘要

具有多层压电基板的声表面波（SAW）器件由于其高品质因数而具有优异的性能。多层压电基板与能够用非常小的阵列实现声波反射的声子晶体结构相结合，可以实现小型化和高性能。本文提出了一种基于42°Y-X LT/SiO/多晶硅/Si层状基板的蜂窝状声子晶体结构。利用色散和传输特性对各种填充率下的带隙分布进行了分析。为了研究声子晶体在SAW器件中的应用，对具有不同反射器的单端口谐振器进行了比较和分析。基于频率响应曲线和波特-品质因数曲线，发现当将蜂窝状声子晶体（HC-PnC）结构用作反射器时，它不仅可以提高谐振器的传输损耗，还可以减小器件尺寸。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/68a9dec648dd/micromachines-15-01256-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/9657bd70162e/micromachines-15-01256-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/e388b0da5364/micromachines-15-01256-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/128a39462e84/micromachines-15-01256-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/5e9b33e3d70f/micromachines-15-01256-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/4b5b1bc934eb/micromachines-15-01256-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/30a30cf908d0/micromachines-15-01256-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/ab1013d2b866/micromachines-15-01256-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/9c5303ce314b/micromachines-15-01256-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/68a9dec648dd/micromachines-15-01256-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/9657bd70162e/micromachines-15-01256-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/e388b0da5364/micromachines-15-01256-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/128a39462e84/micromachines-15-01256-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/5e9b33e3d70f/micromachines-15-01256-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/4b5b1bc934eb/micromachines-15-01256-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/30a30cf908d0/micromachines-15-01256-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/ab1013d2b866/micromachines-15-01256-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/9c5303ce314b/micromachines-15-01256-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4db4/11509270/68a9dec648dd/micromachines-15-01256-g009.jpg

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Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal.利用小横截面连接声子晶体提高压电微机电系统谐振器的品质因数
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Development and Application of SAW Filter.
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