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声表面波滤波器的研制与应用

Development and Application of SAW Filter.

作者信息

Chen Pu, Li Guangxi, Zhu Zhiyuan

机构信息

Henan Province Engineering Research Center of Ultrasonic Technology Application, Pingdingshan University, Pingdingshan 467000, China.

College of Electronic and Information Engineering, Southwest University, Chongqing 400715, China.

出版信息

Micromachines (Basel). 2022 Apr 20;13(5):656. doi: 10.3390/mi13050656.

DOI:10.3390/mi13050656
PMID:35630123
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9145957/
Abstract

With the in-depth advancement of the fifth generation (5G) mobile communication technology, the technical requirements for filters are also constantly improving. Surface acoustic wave (SAW) filters are widely used in home TV, mobile communications, radio frequency filters and radar due to their simple structure, few mask layers, easy miniaturization, and low cost. Through the continuous improvement of communication technology, SAW has developed into various high-performance acoustic filters from bulk SAW with the support of some new architectures, new materials and advanced modeling techniques. This paper analyzes and reviews the research situation of SAW filter technology.

摘要

随着第五代(5G)移动通信技术的深入推进,对滤波器的技术要求也在不断提高。表面声波(SAW)滤波器因其结构简单、掩膜层数少、易于小型化且成本低,而广泛应用于家用电视、移动通信、射频滤波器和雷达中。通过通信技术的不断进步,在一些新架构、新材料和先进建模技术的支持下,SAW已从体声波SAW发展成为各种高性能声学滤波器。本文对SAW滤波器技术的研究现状进行了分析和综述。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/cac6a1587883/micromachines-13-00656-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/0eaedf0d23b7/micromachines-13-00656-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/cba6be5b8ab2/micromachines-13-00656-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/2fbd90b9356f/micromachines-13-00656-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/62dd3f8a4d92/micromachines-13-00656-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/cac6a1587883/micromachines-13-00656-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/0eaedf0d23b7/micromachines-13-00656-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/cba6be5b8ab2/micromachines-13-00656-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/2fbd90b9356f/micromachines-13-00656-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/62dd3f8a4d92/micromachines-13-00656-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/26ed/9145957/cac6a1587883/micromachines-13-00656-g005.jpg

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2
Nanoscale electrodeposition: Dimension control and 3D conformality.纳米级电沉积:尺寸控制与三维保形性。
Exploration (Beijing). 2021 Nov 7;1(3):20210012. doi: 10.1002/EXP.20210012. eCollection 2021 Dec.
3
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超高性能表面声波器件中高频杂散响应的建模
Micromachines (Basel). 2024 Jan 15;15(1):134. doi: 10.3390/mi15010134.
4
Designed Structures of Interdigital Electrodes for Thin Film SAW Devices.用于薄膜声表面波器件的叉指电极设计结构。
Micromachines (Basel). 2023 Oct 14;14(10):1929. doi: 10.3390/mi14101929.
5
Editorial for the Special Issue on Physics in Micro/Nano Devices: From Fundamental to Application.《微纳器件中的物理:从基础到应用》特刊社论
Micromachines (Basel). 2023 Aug 8;14(8):1571. doi: 10.3390/mi14081571.
Micromachines (Basel). 2021 Nov 26;12(12):1454. doi: 10.3390/mi12121454.
4
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5
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6
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7
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