Syms Richard
EEE Department, Imperial College London, Exhibition Road, London SW7 2AZ, UK.
Micromachines (Basel). 2024 Oct 14;15(10):1257. doi: 10.3390/mi15101257.
Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, coupled beam arrays is then demonstrated using a lumped element model, and the conditions for full power transfer are established. Four-port devices, including directional couplers and coupler filters with complementary transmission ports, are then demonstrated. Predictions are verified for realistic device layouts using the stiffness matrix method.
本文提出了基于纳米机电系统耦合梁阵列的准光学四端口声学器件的理论模型。首先回顾了与微波、超声、光学和电子波光学中的耦合模式器件以及耦合梁滤波器的类比。然后使用集总元件模型演示了两个机械耦合、静电驱动的耦合梁阵列之间的功率传输，并确定了全功率传输的条件。接着展示了四端口器件，包括具有互补传输端口的定向耦合器和耦合器滤波器。使用刚度矩阵方法对实际器件布局的预测进行了验证。
