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磁控溅射过程中,在反应气氛(Ar + CF)中由碳铬纳米复合涂层沉积产生的氟化铬的形成及其机械化学性质

Formation and Mechano-Chemical Properties of Chromium Fluorides Originated from the Deposition of Carbon-Chromium Nanocomposite Coatings in the Reactive Atmosphere (Ar + CF) during Magnetron Sputtering.

作者信息

Roślak Adam, Doering Józef, Strzałka Wioletta, Makówka Marcin, Jędrzejczak Anna, Kołodziejczyk Łukasz, Balcerzak Jacek, Jóźwiak Łukasz, Piwoński Ireneusz, Pawlak Wojciech

机构信息

Institute of Materials Science and Engineering, Faculty of Mechanical Engineering, Lodz University of Technology, 1/15 Stefanowskiego St., 90-537 Lodz, Poland.

Department of Molecular Engineering, Faculty of Process and Environmental Engineering, Lodz University of Technology, 213 Wolczanska St., 93-005 Lodz, Poland.

出版信息

Materials (Basel). 2024 Oct 15;17(20):5034. doi: 10.3390/ma17205034.

Abstract

The literature analysis did not indicate any studies on fluorination tests of carbon nanocomposite coatings doped with transition metals in a form of nanocrystalline metal carbide in amorphous carbon matrix (nc-MeC/a-C). As a model coating to investigate the effect of fluorination in a tetrafluoromethane (CF) atmosphere, a nanocomposite carbon coating doped with chromium-forming nanocrystals of chromium carbides in a-C matrix (nc-CrC/a-C) produced by magnetron sputtering from graphite targets and using a Pulse-DC type medium frequency power supply was chosen. After the deposition of the gradient chromium carbonitride (CrCN) adhesive sublayer, the fluorination of the main coating was conducted in a reactive mode in an (Ar + CF) atmosphere at various CF content. It was observed that the presence of CF in the atmosphere resulted in a reduced amount of chromium carbides formed in favor of chromium fluorides. Thus far, this is an observation that seems unnoticed by the carbon coatings researchers. Fluorine was assumed to bond much more readily to carbon than to chromium, due to the stability of tetrafluoromethane (CF). The opposite seems to be true. The mechanical properties (nano-hardness and Young's modulus) and tribological properties in the 'pin-on-disc' friction pair are presented, along with the analysis of bonds occurring between chromium, carbon, and fluorine by means of X-ray photoelectron spectroscopy (XPS).

摘要

文献分析未表明有任何关于在非晶碳基体(nc-MeC/a-C)中以纳米晶金属碳化物形式掺杂过渡金属的碳纳米复合涂层的氟化测试研究。作为研究四氟甲烷(CF)气氛中氟化作用的模型涂层,选择了通过磁控溅射从石墨靶材并使用脉冲直流型中频电源制备的在a-C基体中掺杂形成碳化铬纳米晶体的纳米复合碳涂层(nc-CrC/a-C)。在沉积梯度碳氮化铬(CrCN)粘结子层后,在不同CF含量的(Ar + CF)气氛中以反应模式对主涂层进行氟化处理。观察到气氛中CF的存在导致形成的碳化铬量减少,转而有利于形成氟化铬。到目前为止,这一观察结果似乎未被碳涂层研究人员注意到。由于四氟甲烷(CF)的稳定性,氟被认为与碳的结合比与铬的结合更容易。但事实似乎恰恰相反。本文给出了“销盘”摩擦副中的力学性能(纳米硬度和杨氏模量)和摩擦学性能,以及通过X射线光电子能谱(XPS)对铬、碳和氟之间形成的键进行的分析。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5c60/11509688/d3fe8b2f0540/materials-17-05034-g001.jpg

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