Balogun Shuaib A, Losego Mark D
School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30318, United States.
J Phys Chem C Nanomater Interfaces. 2024 Nov 13;128(47):20081-20092. doi: 10.1021/acs.jpcc.4c04986. eCollection 2024 Nov 28.
This study investigates the use of TiCl vapor phase infiltration (VPI) to cleave ester groups in the main chain of a polymer and drive depolymerization and film etching. Prior investigations have demonstrated that the infiltration of TiCl into PMMA results in dealkylation of its ester bond, cleaving its side groups. This study investigates the VPI of TiCl into poly(lactic acid), which is a prototypical polymer with an ester group in its main chain. Utilizing quartz crystal microbalance (QCM) measurements and spectroscopic ellipsometry, PLA is observed to depolymerize readily at 135 °C with extended TiCl precursor exposure, resulting in significant thickness and mass reduction, whereas at 90 °C, depolymerization is significantly slower and etching is negligible. Utilizing Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and a residual gas analyzer (RGA), dealkylation is shown to be the primary depolymerization mechanism. FTIR and XPS analyses reveal the consumption of carbonyl and methoxy groups and the emergence of hydroxyl, chlorine, and titanium moieties. RGA measurements provide further insights into the byproducts formed during the TiCl and water exposure steps, indicating that the depolymerized components undergo further breakdown into other substances. Residuals left after 135 °C TiCl VPI are easily removed with a 0.1 M HCl aqueous solution. These findings highlight the expanding functionality of VPI, revealing its capability as both an additive and subtractive process and suggesting its broader applications.
本研究调查了使用TiCl气相渗透(VPI)来裂解聚合物主链中的酯基并驱动解聚和薄膜蚀刻。先前的研究表明,TiCl渗透到聚甲基丙烯酸甲酯(PMMA)中会导致其酯键脱烷基化,从而裂解其侧基。本研究调查了TiCl对聚乳酸的气相渗透,聚乳酸是一种在主链中含有酯基的典型聚合物。利用石英晶体微天平(QCM)测量和光谱椭偏仪,观察到在135°C下,随着TiCl前驱体暴露时间延长,聚乳酸很容易解聚,导致厚度和质量显著降低,而在90°C下,解聚速度明显较慢,蚀刻可忽略不计。利用傅里叶变换红外光谱(FTIR)、X射线光电子能谱(XPS)和残余气体分析仪(RGA),脱烷基化被证明是主要的解聚机制。FTIR和XPS分析揭示了羰基和甲氧基的消耗以及羟基、氯和钛部分的出现。RGA测量进一步深入了解了TiCl和水暴露步骤中形成的副产物,表明解聚后的成分会进一步分解成其他物质。135°C TiCl VPI后留下的残余物很容易用0.1M盐酸水溶液去除。这些发现突出了VPI不断扩展的功能,揭示了其作为加法和减法工艺的能力,并暗示了其更广泛的应用。