Waller Erik Hagen, Duran Stefan, von Freymann Georg
Fraunhofer Institute for Industrial Mathematics ITWM, 67663 Kaiserslautern, Germany.
Physics Department and State Research Center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany.
Nanophotonics. 2023 Jan 13;12(8):1549-1555. doi: 10.1515/nanoph-2022-0604. eCollection 2023 Apr.
A method for direct fabrication of 3D silver microstructures with high fabrication throughput on virtually any substrate is presented. The method is based on laser-induced photoreduction of silver ions to silver atoms, supported by nucleation, substrate functionalization and a multiple exposure fabrication process. The combination of the novel photosensitive suspension and the novel fabrication scheme enables effective fabrication speeds of up to 1 cm per second, with a minimum structure size of less than 1 μm, a resolution of more than 750 lines/mm and a resistivity of 3.0 · 10 Ωm. With this fabrication speed, it is now possible to produce conductive silver topographies several millimeters in length. Thus, with a single technology, one can fabricate photonic components with characteristic spectral features ranging from mid-to far-infrared.
本文提出了一种在几乎任何衬底上以高制造通量直接制造三维银微结构的方法。该方法基于激光诱导银离子光还原为银原子，并辅以成核、衬底功能化和多次曝光制造工艺。新型光敏悬浮液和新型制造方案的结合实现了高达每秒1厘米的有效制造速度，最小结构尺寸小于1微米，分辨率超过750线/毫米，电阻率为3.0·10Ωm。以这种制造速度，现在可以生产长度为几毫米的导电银拓扑结构。因此，通过单一技术，可以制造具有从中红外到远红外特征光谱特征的光子组件。
