Han Jinli, Bao Rui, Wu Rongbo, Liu Zhaoxiang, Wang Zhe, Sun Chao, Zhang Zhihao, Li Mengqi, Fang Zhiwei, Wang Min, Zhang Haisu, Cheng Ya
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Sciences, East China Normal University, Shanghai 200241, China.
Nanophotonics. 2024 Apr 5;13(15):2839-2846. doi: 10.1515/nanoph-2024-0020. eCollection 2024 Jul.
Photonic-integrated circuits based on erbium-doped thin film lithium niobate on insulator has attracted broad interests with insofar various waveguide amplifiers and microlasers demonstrated. Wideband operation facilitated by the broadband absorption and emission of erbium ions necessitates the functional integration of wavelength filter and multiplexer on the same chip. Here, a low-loss wavelength division multiplexer at the resonant pumping and emission wavelengths (∼1480 nm and 1530-1560 nm) of erbium ions based on angled multimode interferometer is realized in the erbium-doped thin film lithium niobate on insulator fabricated by the photolithography assisted chemomechanical etching technique. The minimum on-chip insertion losses of the fabricated device are <0.7 dB for both wavelength ranges, and a 3-dB bandwidth of >20 nm is measured at the telecom C-band. Besides, direct visualization of the multimode interference pattern by the visible upconversion fluorescence of erbium ions compares well with the simulated light propagation in the multimode interferometer. Spectral tuning of the wavelength division multiplexer by structural design is also demonstrated and discussed.
基于绝缘体上掺铒薄膜铌酸锂的光子集成电路,由于已展示出多种波导放大器和微激光器,已引起广泛关注。铒离子的宽带吸收和发射促进了宽带操作,这就需要在同一芯片上对波长滤波器和复用器进行功能集成。在此,基于角度多模干涉仪,在通过光刻辅助化学机械蚀刻技术制造的绝缘体上掺铒薄膜铌酸锂中,实现了在铒离子的共振泵浦和发射波长(约1480 nm和1530 - 1560 nm)处的低损耗波分复用器。对于这两个波长范围,所制造器件的最小片上插入损耗均小于0.7 dB,并且在电信C波段测得的3 dB带宽大于20 nm。此外,通过铒离子的可见上转换荧光对多模干涉图案进行直接可视化,与多模干涉仪中模拟的光传播情况吻合良好。还展示并讨论了通过结构设计对波分复用器进行光谱调谐的情况。