Sun Chao, Liang Youting, Liu Jian, Zhou Yuan, Zhang Zhihao, Chen Jinming, Liu Zhaoxiang, Fang Zhiwei, Wang Min, Zhang Haisu, Cheng Ya
Opt Lett. 2024 Dec 15;49(24):6996-6999. doi: 10.1364/OL.544271.
Erbium-doped thin-film lithium niobate (TFLN) lasers have attracted great interest in recent years due to their compatibility with high-speed electro-optic (EO) modulation on the same platform. In this work, high-efficiency single-mode erbium-doped microring lasers with milliwatt output powers were demonstrated. Monolithic lithium niobate microring resonators using pulley-waveguide-coupling were fabricated by the photolithography assisted chemo-mechanical etching (PLACE) technique. The maximum single-mode laser power of 1.26 mW with the side-mode suppression ratio (SMSR) of 50 dB was achieved around the wavelength of 1562 nm, as well as the maximum laser slope efficiency of 2.51% and the minimum laser linewidth of 30 kHz. Besides, the lasing band was easily switched by the pulley-coupler with variable waveguide widths. The demonstrated milliwatt-level on-chip microlasers hold great promise as bright light sources for various integrated devices on the TFLN platform such as EO modulators and combs.
近年来,掺铒薄膜铌酸锂(TFLN)激光器因其与同一平台上的高速电光(EO)调制的兼容性而备受关注。在这项工作中,展示了具有毫瓦输出功率的高效单模掺铒微环激光器。采用光刻辅助化学机械蚀刻(PLACE)技术制造了使用滑轮波导耦合的单片铌酸锂微环谐振器。在1562nm波长附近实现了最大单模激光功率1.26mW,边模抑制比(SMSR)为50dB,以及最大激光斜率效率2.51%和最小激光线宽30kHz。此外,通过具有可变波导宽度的滑轮耦合器可以轻松切换激光波段。所展示的毫瓦级片上微激光器作为TFLN平台上各种集成器件(如EO调制器和梳子)的明亮光源具有巨大潜力。