Bucio Thalía Domínguez, Khokhar Ali Z, Mashanovich Goran Z, Gardes Frederic Y
Opt Lett. 2018 Mar 15;43(6):1251-1254. doi: 10.1364/OL.43.001251.
We report the design and fabrication of a compact angled multimode interferometer (AMMI) on a 600 nm thick N-rich silicon nitride platform (n=1.92) optimized to match the International Telecommunication Union coarse wavelength division (de)multiplexing standard in the O telecommunication band. The demonstrated device exhibited a good spectral response with Δλ=20 nm, BW∼11 nm, IL<1.5 dB, and XT∼20 dB. Additionally, it showed a high tolerance to dimensional errors <120 pm/nm and low sensitivity to temperature variations <20 pm/°C, respectively. This device had a footprint of 0.02 mm×1.7 mm with the advantage of a simple design and a back-end-of-line compatible fabrication process that enables multilayer integration schemes due to its processing temperature <400°C.
我们报告了一种紧凑型倾斜多模干涉仪（AMMI）的设计与制造，该干涉仪基于厚度为600 nm的富氮氮化硅平台（n = 1.92），经过优化以匹配国际电信联盟在O波段的粗波分复用标准。所展示的器件具有良好的光谱响应，Δλ = 20 nm，带宽BW ∼ 11 nm，插入损耗IL < 1.5 dB，串扰XT ∼ 20 dB。此外，它分别对尺寸误差具有< 120 pm/nm的高容忍度以及对温度变化具有< 20 pm/°C的低灵敏度。该器件的占地面积为0.02 mm×1.7 mm，具有设计简单以及后端线路兼容制造工艺的优点，由于其处理温度< 400°C，能够实现多层集成方案。
