Liu Yuechen, Feng Chao, Dong Siyu, Zhu Jingyuan, Wang Zhanshan, Cheng Xinbin
MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092, China.
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China.
Nanomaterials (Basel). 2023 Sep 23;13(19):2624. doi: 10.3390/nano13192624.
On-chip multi-dimensional detection systems integrating pixelated polarization and spectral filter arrays are the latest trend in optical detection instruments, showing broad application potential for diagnostic medical imaging and remote sensing. However, thin-film or microstructure-based filter arrays typically have a trade-off between the detection dimension, optical efficiency, and spectral resolution. Here, we demonstrate novel on-chip integrated polarization spectral detection filter arrays consisting of metasurfaces and multilayer films. The metasurfaces with two nanopillars in one supercell are designed to modulate the Jones matrix for polarization selection. The angle of diffraction of the metasurfaces and the optical Fabry-Perot (FP) cavities determine the spectrum's center wavelength. The polarization spectral filter arrays are placed on top of the CMOS sensor; each array corresponds to one pixel, resulting in high spectral resolution and optical efficiency in the selected polarization state. To verify the methodology, we designed nine-channel polarized spectral filter arrays in a wavelength range of 1350 nm to 1550 nm for transverse electric (TE) linear polarization. The array has a 10 nm balanced spectral resolution and average peak transmission efficiency of over 75%, which is maintained by utilizing lossless dielectric material. The proposed array can be fabricated using overlay e-beam lithography, and the process is CMOS-compatible. The proposed array enables broader applications of in situ on-chip polarization spectral detection with high efficiency and spectral resolution, as well as in vivo imaging systems.
集成像素化偏振和光谱滤波器阵列的片上多维检测系统是光学检测仪器的最新发展趋势，在诊断医学成像和遥感领域显示出广阔的应用潜力。然而，基于薄膜或微结构的滤波器阵列通常在检测维度、光学效率和光谱分辨率之间存在权衡。在此，我们展示了一种由超表面和多层膜组成的新型片上集成偏振光谱检测滤波器阵列。在一个超单元中具有两个纳米柱的超表面被设计用于调制琼斯矩阵以进行偏振选择。超表面的衍射角和光学法布里 - 珀罗（FP）腔决定了光谱的中心波长。偏振光谱滤波器阵列放置在CMOS传感器顶部；每个阵列对应一个像素，从而在选定的偏振状态下实现高光谱分辨率和光学效率。为了验证该方法，我们针对横向电（TE）线偏振设计了波长范围在1350 nm至1550 nm的九通道偏振光谱滤波器阵列。该阵列具有10 nm的平衡光谱分辨率和超过75%的平均峰值传输效率，通过使用无损介电材料得以保持。所提出的阵列可以使用叠加电子束光刻技术制造，并且该工艺与CMOS兼容。所提出的阵列能够实现具有高效率和光谱分辨率的原位片上偏振光谱检测以及体内成像系统的更广泛应用。
