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抗衡阴离子在GaAs上ZnS薄膜溶液沉积中的作用

The Role of Counteranions in Solution Deposition of ZnS Thin Films on GaAs.

作者信息

Zakay Noy, Rand Shlomo, Rashkovskiy Alexander, Maman Nitzan, Ezersky Vladimir, Golan Yuval

机构信息

Department of Materials Engineering, Ben-Gurion University of the Negev, Beer-Sheva 8410501, Israel.

Ilse Katz Institute for Nanoscale Science and Technology, Ben-Gurion University of the Negev, Beer-Sheva 8410501, Israel.

出版信息

Inorg Chem. 2024 Dec 23;63(51):24104-24114. doi: 10.1021/acs.inorgchem.4c03424. Epub 2024 Dec 11.

Abstract

Using 5 commonly employed precursors for Zn cations, ZnSO, ZnI, ZnCl, Zn(NO), and Zn(CHCOO), we demonstrate the effect of counterions on ZnS thin film formation. We show that both film nucleation and growth stages are strongly dependent on the Zn precursor type. We systematically studied the mechanisms of thin film deposition on GaAs(100), including solution-substrate interactions, Zn ion adsorption on the substrate, and nuclei formation as well as stress accumulation during film growth. It was shown that the early stages of film formation play a key role in the subsequent growth kinetics and resulting film quality. X-ray photoelectron spectroscopy, supported by contact angle measurements, transmission electron microscopy, and energy-dispersive spectroscopy showed that increasing the degree of surface oxidation and passivation at the early stages of ZnS film formation inhibits solution desorption. Finally, the previously reported mechanism of crack formation is explored through an interrupted growth series of ZnS films deposited from solutions with different Zn precursors.

摘要

使用5种常用的锌阳离子前驱体,即硫酸锌(ZnSO)、碘化锌(ZnI)、氯化锌(ZnCl)、硝酸锌(Zn(NO))和醋酸锌(Zn(CHCOO)),我们展示了抗衡离子对硫化锌薄膜形成的影响。我们表明,薄膜的成核和生长阶段都强烈依赖于锌前驱体的类型。我们系统地研究了在砷化镓(GaAs(100))上薄膜沉积的机制,包括溶液与衬底的相互作用、锌离子在衬底上的吸附、核的形成以及薄膜生长过程中的应力积累。结果表明,薄膜形成的早期阶段在随后的生长动力学和最终薄膜质量中起着关键作用。X射线光电子能谱,辅以接触角测量、透射电子显微镜和能量色散光谱表明,在硫化锌薄膜形成的早期阶段增加表面氧化和钝化程度会抑制溶液解吸。最后,通过从含有不同锌前驱体的溶液中沉积的硫化锌薄膜的中断生长系列,探索了先前报道的裂纹形成机制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/41f9/11684027/15653f314cd1/ic4c03424_0001.jpg

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