Li Yang, Zhang Guanqing, Tang Yutao, Zhang Xuecai, Cai Wenfeng, Liu Yanjun, Cao Tun, Li Guixin
School of Biomedical Engineering, Dalian University of Technology, Dalian 116024, China.
Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China.
Nanophotonics. 2022 Apr 20;11(10):2245-2251. doi: 10.1515/nanoph-2021-0712. eCollection 2022 May.
The nonlinear optical properties of silicon have great potentials for developing all-optical switches and modulators, etc. Strategies based on all dielectric silicon photonic crystals and resonators have been proposed to design the nanophotonic devices with high nonlinearity. Nevertheless, the lack of compatible configuration with the mature CMOS technology may hinder the practical applications of the all dielectric devices. In this work, we proposed a metal-silicon hybrid metasurface to generate strong third harmonic signals from an amorphous silicon (α-Si) film. By integrating the α-Si film into a gold plasmonic nanocavity and controlling the periods of the gold meta-atoms, the efficiency of the THG process is expected to be greatly boosted. Compared to the planar α-Si film, the THG signal is enhanced by a factor of ∼370. The presented results in this work may open new routes for developing various silicon photonic devices with high optical nonlinearity.
硅的非线性光学特性在开发全光开关和调制器等方面具有巨大潜力。基于全介质硅光子晶体和谐振器的策略已被提出用于设计具有高非线性的纳米光子器件。然而，与成熟的CMOS技术缺乏兼容配置可能会阻碍全介质器件的实际应用。在这项工作中，我们提出了一种金属-硅混合超表面，以从非晶硅（α-Si）薄膜中产生强烈的三次谐波信号。通过将α-Si薄膜集成到金等离子体纳米腔中并控制金超原子的周期，三次谐波产生（THG）过程的效率有望得到极大提高。与平面α-Si薄膜相比，THG信号增强了约370倍。这项工作中呈现的结果可能为开发各种具有高光非线性的硅光子器件开辟新途径。
