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用于三维皮米计量的无限小光学奇点尺。

Infinitesimal optical singularity ruler for three-dimensional picometric metrology.

作者信息

Ma Haixiang, Zhang Yuquan, Zhou Jiakang, Feng Fu, Somekh Michael G, Min Changjun, Yuan Xiaocong

机构信息

Nanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, 51806, China.

Research Center for Frontier Fundamental Studies, Zhejiang Lab, Hangzhou, 311100, China.

出版信息

Nat Commun. 2024 Dec 30;15(1):10853. doi: 10.1038/s41467-024-55210-0.

DOI:10.1038/s41467-024-55210-0
PMID:39738042
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11686152/
Abstract

Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of 4.5 pm (λ/140000) in the transverse direction and 24.2 pm (λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm.

摘要

在现代物理学和先进技术中,三维空间中具有皮米级精度的光学计量学具有相当重要的意义。光学干涉是一种有效的方法,但具有快速空间变化的技术有可能提高测量精度,随着测量尺寸的减小,这将是必需的。在此,引入了极小光学相位奇点标尺的概念。受用于定位质心的著名铅垂线技术的启发,提出了一种类似的奇点线技术,用于在横向以约4.5皮米(约λ/140000)的精度和纵向以约24.2皮米(约λ/26000)的精度定位光学奇点。这个精确定位的奇点可以作为一把标尺,以接近约60皮米的精度检测位移信号。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/56ab276d09ba/41467_2024_55210_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/a3368a28e69c/41467_2024_55210_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/90fd0d436540/41467_2024_55210_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/01b513dbf405/41467_2024_55210_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/56ab276d09ba/41467_2024_55210_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/a3368a28e69c/41467_2024_55210_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/90fd0d436540/41467_2024_55210_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/01b513dbf405/41467_2024_55210_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ccea/11686152/56ab276d09ba/41467_2024_55210_Fig4_HTML.jpg

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