Wu Yue, Zhang Xinyuan, Ma Zhe, Hong Weida, You Chunyu, Zhu Hong, Zong Yang, Hu Yuhang, Xu Borui, Huang Gaoshan, Di Zengfeng, Mei Yongfeng
Department of Materials Science & International Institute of Intelligent Nanorobots and Nanosystems, State Key Laboratory of Surface Physics, Fudan University, Shanghai 200438, People's Republic of China.
Yiwu Research Institute of Fudan University, Yiwu 322000, Zhejiang, People's Republic of China.
ACS Nano. 2025 Jan 14;19(1):331-344. doi: 10.1021/acsnano.4c07589. Epub 2025 Jan 3.
Freestanding nanomembranes fabricated by lift-off technology have been widely utilized in microelectromechanical systems, soft electronics, and microrobotics. However, a conventional chemical etching strategy to eliminate nanomembrane adhesion often restricts material choice and compromises quality. Herein, we propose a nanomembrane-on-graphene strategy that leverages the weak van der Waals adhesion on graphene to achieve scalable and controllable release and 3D construction of nanomembranes. This fragile adhesion allows for precise delamination under stimulations, such as surface tension, thermal treatment, and mechanical bending. This strategy is compatible with various inorganic materials, including oxides, semiconductors, and metals, and allows for precise control of rolling and folding into 3D microstructures. Demonstrations include tubular microrobots with diverse locomotion and biodegradable nerve scaffolds based on facile delamination. Our nanomembrane-on-graphene strategy offers a versatile platform for the fabrication of functionalized microstructures.
通过剥离技术制造的独立纳米膜已广泛应用于微机电系统、柔性电子学和微型机器人技术。然而，传统的消除纳米膜附着力的化学蚀刻策略往往限制了材料的选择并影响了质量。在此，我们提出了一种石墨烯上纳米膜策略，该策略利用石墨烯上较弱的范德华力附着力来实现纳米膜的可扩展和可控释放以及三维构建。这种脆弱的附着力使得在诸如表面张力、热处理和机械弯曲等刺激下能够进行精确分层。该策略与各种无机材料兼容，包括氧化物、半导体和金属，并允许精确控制纳米膜卷绕和折叠成三维微结构。演示包括具有多种运动方式的管状微型机器人以及基于简便分层的可生物降解神经支架。我们的石墨烯上纳米膜策略为功能化微结构的制造提供了一个通用平台。
