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用于超高精度工程的压电柔性器件的最新进展

Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering.

作者信息

Wu Zeyi, Wu Zehao, Chen I-Ming, Xu Qingsong

机构信息

Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China.

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore.

出版信息

Micromachines (Basel). 2024 Nov 29;15(12):1456. doi: 10.3390/mi15121456.

DOI:10.3390/mi15121456
PMID:39770209
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11677329/
Abstract

With advancements in small-scale research fields, precision manipulation has become crucial for interacting with small objects. As research progresses, the demand for higher precision in manipulation has led to the emergence of ultrahigh-precision engineering (UHPE), which exhibits significant potential for various applications. Traditional rigid-body manipulators suffer from issues like backlash and friction, limiting their effectiveness at smaller-scale applications. Smart materials, particularly piezoelectric materials, offer promising solutions with their rapid response and high resolution, making them ideal for creating efficient piezoelectric transducers. Meanwhile, compliant mechanisms, which use elastic deformation to transmit force and motion, eliminate inaccuracies induced by rigid-body mechanisms. Integrating piezoelectric transducers and compliant mechanisms into piezoelectric compliant devices enhances UHPE system performance. This paper reviews the recent advances in piezoelectric compliant devices. By focusing on the utilization of piezoelectric transducers and compliant mechanisms, their applications in perception, energy harvesting, and actuation have been surveyed, and future research suggestions are discussed.

摘要

随着小规模研究领域的发展,精确操作对于与小物体进行交互变得至关重要。随着研究的推进,对更高精度操作的需求催生了超高精度工程(UHPE),其在各种应用中展现出巨大潜力。传统的刚体操纵器存在诸如齿隙和摩擦等问题,限制了它们在较小规模应用中的有效性。智能材料,特别是压电材料,凭借其快速响应和高分辨率提供了有前景的解决方案,使其成为制造高效压电换能器的理想选择。同时,利用弹性变形来传递力和运动的柔顺机构消除了刚体机构引起的不精确性。将压电换能器和柔顺机构集成到压电柔顺装置中可提高UHPE系统性能。本文综述了压电柔顺装置的最新进展。通过聚焦于压电换能器和柔顺机构的利用,对它们在感知、能量收集和驱动方面的应用进行了调研,并讨论了未来的研究建议。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/6ed0f5fb7278/micromachines-15-01456-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/d01b2cfd8df1/micromachines-15-01456-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/505e50168f95/micromachines-15-01456-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/13b0681646be/micromachines-15-01456-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/8e670dc79b35/micromachines-15-01456-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/6caf5c217233/micromachines-15-01456-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/58c9836af9ec/micromachines-15-01456-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/fab7235ca3cf/micromachines-15-01456-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/596232928a19/micromachines-15-01456-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/1c193a07db37/micromachines-15-01456-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/fd6bb1bc2e1d/micromachines-15-01456-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/5c3e0fd5b844/micromachines-15-01456-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/7719a7f88115/micromachines-15-01456-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/6ed0f5fb7278/micromachines-15-01456-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/d01b2cfd8df1/micromachines-15-01456-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/505e50168f95/micromachines-15-01456-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/13b0681646be/micromachines-15-01456-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/8e670dc79b35/micromachines-15-01456-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/6caf5c217233/micromachines-15-01456-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/58c9836af9ec/micromachines-15-01456-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/fab7235ca3cf/micromachines-15-01456-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/596232928a19/micromachines-15-01456-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/1c193a07db37/micromachines-15-01456-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/fd6bb1bc2e1d/micromachines-15-01456-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/5c3e0fd5b844/micromachines-15-01456-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/7719a7f88115/micromachines-15-01456-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9334/11677329/6ed0f5fb7278/micromachines-15-01456-g013.jpg

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A survey on the mechanical design for piezo-actuated compliant micro-positioning stages.关于压电驱动柔性微定位平台机械设计的一项调查。
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