IEEE Trans Ultrason Ferroelectr Freq Control. 2022 Nov;69(11):3057-3069. doi: 10.1109/TUFFC.2022.3175853. Epub 2022 Nov 2.
The piezoelectric actuator is a kind of actuation device that acts through the inverse piezoelectric effect. Due to advantages of high precision, low power consumption, compact size, and flexible structure design, they have a wide range of applications in optics, robotics, microelectromechanical systems, and so on. Piezoelectric materials are the core materials for piezoelectric actuators. In this review, recent developments in high-performance piezoelectric materials (HPMs) are introduced, including relaxor ferroelectric crystals, textured ceramics, piezoelectric metamaterials, and so on. The advances of piezoelectric actuators are introduced in this review based on the developments of those piezoelectric materials, where the relationship between the figure of merits of materials and the performance of actuators is also discussed. Finally, we present outlooks and challenges for piezoelectric materials and actuators.
压电致动器是一种通过逆压电效应进行作用的驱动装置。由于具有高精度、低功耗、小巧尺寸和灵活结构设计等优点，它们在光学、机器人技术、微机电系统等领域有广泛的应用。压电材料是压电致动器的核心材料。在这篇综述中，介绍了高性能压电材料（HPMs）的最新发展，包括弛豫铁电晶体、织构陶瓷、压电超材料等。基于这些压电材料的发展，介绍了压电致动器的进展，并讨论了材料的优值与致动器性能之间的关系。最后，提出了对压电材料和致动器的展望和挑战。
