Geist Jon, Metry Hany, Gonzalez Aldo Adrian Garcia, Rueda Arturo Ruiz, Micheli Giancarlo Barbosa, Dias Ronaldo da Silva, Gaitan Michael
National Institute of Standards and Technology (NIST), Gaithersburg, MD 20899, USA.
National Institute of Standards (NIS), Giza 12211, Egypt.
Micromachines (Basel). 2024 Dec 14;15(12):1494. doi: 10.3390/mi15121494.
We describe a modification of a previously described measurement-analysis protocol to determine the intrinsic properties of triaxial accelerometers by using a measurement protocol based on angular stepwise rotation in the Earth's gravitational field. This study was conducted with MEMS triaxial accelerometers that were co-integrated in four consumer-grade wireless microsensors. The measurements were carried out on low-cost rotation tables in different laboratories in different countries to simulate the reproducibility environment encountered in inter-comparisons of calibration capabilities. We used a previously described calibration-uncertainty metric to independently characterize the overall uncertainty of the calibration and analysis process. The intrinsic property analysis suggested, and the uncertainty metric confirmed, an unacceptably large error in one combination of microsystem and low-cost rotation table. A simple modification of the analysis protocol provided a substantial improvement in the reproducibility of the protocol with all combinations of microsystem and rotation table. Later, measurements with a high-performance triaxial accelerometer using a significantly more expensive rotation table carried out at one location further validated the usefulness of this modification. The results reported here also demonstrate the existence of unidentified defects in one microsystem and one low-cost rotation table that interact with each other in ways not currently understood to produce anomalously large errors with the old protocol but not with the new protocol.
我们描述了对先前所述测量分析协议的一种修改，该修改旨在通过使用基于地球引力场中角向逐步旋转的测量协议来确定三轴加速度计的固有特性。本研究使用了集成在四个消费级无线微传感器中的MEMS三轴加速度计。测量是在不同国家的不同实验室中的低成本旋转台上进行的，以模拟在校准能力比对中遇到的可重复性环境。我们使用先前描述的校准不确定度指标来独立表征校准和分析过程的总体不确定性。固有特性分析表明，并且不确定度指标也证实，在微系统和低成本旋转台的一种组合中存在不可接受的大误差。对分析协议进行简单修改后，在微系统和旋转台的所有组合中，协议的可重复性都有了显著提高。后来，在一个地点使用高性能三轴加速度计和明显更昂贵的旋转台进行的测量进一步验证了这种修改的有效性。此处报告的结果还表明，在一个微系统和一个低成本旋转台中存在未识别的缺陷，它们以目前尚不清楚的方式相互作用，从而导致旧协议产生异常大的误差，而新协议则不会。
