Kulkarni Sachin P, Pathak Akhilesh Kumar, Krishnaswamy Sridhar, Aydin Koray
Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States.
Department of Mechanical Engineering, Northwestern University, Evanston, Illinois 60208, United States.
Nano Lett. 2025 Jan 29;25(4):1653-1659. doi: 10.1021/acs.nanolett.4c05817. Epub 2025 Jan 18.
Metasurfaces supporting narrowband resonances are of significant interest in photonics for molecular sensing, quantum light source engineering, and nonlinear photonics. However, many device architectures rely on large refractive index dielectric materials and lengthy fabrication processes. In this work, we demonstrate quasi-bound states in the continuum (quasi-BICs) using a polymer metasurface exhibiting experimental quality factors of 305 at visible wavelengths. Our fabrication process only consists of electron-beam lithography and resist development, making it compatible with large-scale fabrication techniques. Additionally, we address the challenges of integrating colloidal quantum dots (CQDs) into the nanopillars, such as depletion-induced aggregation and excess nanoparticle removal, by leveraging our previously reported nanoparticle functionalization method and modified development procedures. We demonstrate both narrowband and polarized emission from our CQD-integrated quasi-BIC metasurfaces. Our proposed metasurface platform is broadly applicable across various quantum emitters and fabrication methods and could enable advancements in scalable manufacturing of resonant optical devices.
支持窄带共振的超表面在用于分子传感、量子光源工程和非线性光子学的光子学领域具有重大意义。然而，许多器件架构依赖于大折射率介电材料和冗长的制造工艺。在这项工作中，我们使用一种聚合物超表面展示了连续统中的准束缚态（准BICs），该超表面在可见波长下的实验品质因数为305。我们的制造工艺仅包括电子束光刻和光刻胶显影，使其与大规模制造技术兼容。此外，我们通过利用我们先前报道的纳米颗粒功能化方法和改进的显影程序，解决了将胶体量子点（CQD）集成到纳米柱中的挑战，如耗尽诱导聚集和过量纳米颗粒去除。我们展示了集成CQD的准BIC超表面的窄带和偏振发射。我们提出的超表面平台广泛适用于各种量子发射器和制造方法，并可能推动共振光学器件的可扩展制造取得进展。
