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波长约2.9μm的中红外高功率InGaAsSb/AlGaInAsSb多量子阱激光二极管

Mid-Infrared High-Power InGaAsSb/AlGaInAsSb Multiple-Quantum-Well Laser Diodes Around 2.9 μm.

作者信息

Yu Hongguang, Yang Chengao, Chen Yihang, Shi Jianmei, Cao Juntian, Geng Zhengqi, Wang Zhiyuan, Wen Haoran, Zhang Enquan, Zhang Yu, Tan Hao, Wu Donghai, Xu Yingqiang, Ni Haiqiao, Niu Zhichuan

机构信息

Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Nanomaterials (Basel). 2025 Jan 17;15(2):139. doi: 10.3390/nano15020139.

Abstract

Antimonide laser diodes, with their high performance above room temperature, exhibit significant potential for widespread applications in the mid-infrared spectral region. However, the laser's performance significantly degrades as the emission wavelength increases, primarily due to severe quantum-well hole leakage and significant non-radiative recombination. In this paper, we put up an active region with a high valence band offset and excellent crystalline quality with high luminescence to improve the laser's performance. The miscibility gap of the InGaAsSb alloy was systematically investigated by calculating the critical temperatures based on the delta lattice parameter model. As the calculation results show, InGaAsSb, with a compressive strain of 1.74%, used as the quantum well, is out of the miscibility gap with no spinodal decomposition. The quantum wells exhibit high crystalline quality, as evidenced by distinct satellite peaks in XRD curves with a full width at half maximum (FWHM) of 56 arcseconds for the zeroth-order peak, a smooth surface with a root mean square (RMS) roughness of 0.19 nm, room-temperature photoluminescence with high luminous efficiency and narrow FHWM of 35 meV, and well-defined interfaces. These attributes effectively suppress non-radiative recombination, thereby enhancing internal quantum efficiency in the antimonide laser. Furthermore, a novel epitaxial laser structure was designed to acquire low optical absorption loss by decreasing the optical confinement factor in the cladding layer and implementing gradient doping in the p-type cladding layer. The continuous-wave output power of 310 mW was obtained at an injection current of 4.6 A and a heatsink temperature of 15 °C from a 1500 × 100 μm single emitter. The external quantum efficiency of 53% was calculated with a slope efficiency of 0.226 W/A considering both of the uncoated facets. More importantly, the lasing wavelength of our laser exhibited a significant blue shift from 3.4 μm to 2.9 μm, which agrees with our calculated results when modeling the interdiffusion process in a quantum well. Therefore, the interdiffusion process must be considered for proper design and epitaxy to achieve mid-infrared high-power and high-efficiency antimonide laser diodes.

摘要

锑化物激光二极管在室温以上具有高性能,在中红外光谱区域展现出广泛应用的巨大潜力。然而,随着发射波长增加,激光性能显著下降,主要原因是严重的量子阱空穴泄漏和大量非辐射复合。在本文中,我们构建了一个具有高价带偏移和优异晶体质量且发光率高的有源区,以提高激光性能。通过基于δ晶格参数模型计算临界温度,系统研究了InGaAsSb合金的混溶间隙。计算结果表明,用作量子阱的InGaAsSb,压缩应变为1.74%,处于混溶间隙之外,无亚稳分解。量子阱展现出高晶体质量,这由XRD曲线中明显的卫星峰证明,零阶峰的半高宽(FWHM)为56弧秒,表面光滑,均方根(RMS)粗糙度为0.19 nm,室温光致发光具有高发光效率且FWHM窄至35 meV,界面清晰。这些特性有效抑制了非辐射复合,从而提高了锑化物激光中的内量子效率。此外,设计了一种新型外延激光结构,通过降低包层中的光限制因子并在p型包层中实施梯度掺杂来获得低光吸收损耗。从一个1500×100μm的单发射极在注入电流为4.6 A和散热器温度为15°C时获得了310 mW的连续波输出功率。考虑两个未镀膜面,计算得到的斜率效率为0.226 W/A,外部量子效率为53%。更重要的是,我们的激光激射波长从3.4μm显著蓝移至2.9μm,这与我们在对量子阱中的互扩散过程进行建模时的计算结果一致。因此,为了实现中红外高功率和高效率锑化物激光二极管的合理设计和外延,必须考虑互扩散过程。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e3aa/11767628/a9408a6dc8a5/nanomaterials-15-00139-g001.jpg

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