Piechulek Niklas, Xu Lei, Fröhlich Jan, Bründl Patrick, Franke Jörg
Institute for Factory Automation and Production Systems, Friedrich-Alexander-Universität Erlangen Nürnberg, Egerlandstr. 7-9, 91058 Erlangen, Germany.
Micromachines (Basel). 2024 Dec 26;16(1):16. doi: 10.3390/mi16010016.
Three-dimensional Mechatronic Integrated Devices (3D-MIDs) combine mechanical and electrical functions, enabling significant component miniaturization and enhanced functionality. However, their application in high-temperature environments remains limited due to material challenges. Existing research highlights the thermal stability of ceramic substrates; yet, their reliability under high-stress and complex mechanical loading conditions remains a challenge. In this study, 3D-MID components were fabricated using stereolithography (SLA) 3D-printing technology, and the feasibility of circuit miniaturization on high-temperature-resistant resin substrates was explored. Additionally, the influence of laser parameters on resistance values was analyzed using the Response Surface Methodology (RSM). The results demonstrate that SLA 3D-printing achieves substrates with low surface roughness, enabling the precise formation of fine features. Electric circuits are successfully formed on substrates printed with resin mixed with Laser Direct Structuring (LDS) additives, following laser structuring and metallization processes, with a minimum conductor spacing of 150 µm. Furthermore, through the integration of through-holes (vias) and the use of smaller package chips, such as Ball Grid Array (BGA) and Quad Flat No-lead (QFN), the circuits achieve further miniaturization and establish reliable electrical connections via soldering. Taken together, our results demonstrate that thermoset plastics serve as substrates for 3D-MID components, broadening the application scope of 3D-MID technology and providing a framework for circuit miniaturization on SLA-printed substrates.
三维机电一体化集成器件(3D-MIDs)将机械和电气功能结合在一起,可实现显著的元件小型化并增强功能。然而,由于材料方面的挑战,它们在高温环境中的应用仍然有限。现有研究强调了陶瓷基板的热稳定性;然而,它们在高应力和复杂机械负载条件下的可靠性仍然是一个挑战。在本研究中,使用立体光刻(SLA)3D打印技术制造了3D-MID组件,并探索了在耐高温树脂基板上实现电路小型化的可行性。此外,使用响应面法(RSM)分析了激光参数对电阻值的影响。结果表明,SLA 3D打印可实现具有低表面粗糙度的基板,从而能够精确形成精细特征。在与激光直接成型(LDS)添加剂混合的树脂打印基板上,经过激光成型和金属化工艺后,成功形成了电路,最小导体间距为150 µm。此外,通过集成通孔并使用更小的封装芯片,如球栅阵列(BGA)和四方扁平无引脚(QFN),电路实现了进一步的小型化,并通过焊接建立了可靠的电气连接。综上所述,我们的结果表明热固性塑料可作为3D-MID组件的基板,拓宽了3D-MID技术的应用范围,并为SLA打印基板上的电路小型化提供了框架。