Pan Jiong, Bai Chenyu, Zheng Qincheng, Xie Huikai
School of Integrated Circuits and Electronics, Beijing Institute of Technology (BIT), Beijing 100081, China.
BIT Chongqing Center for Microelectronics and Microsystems, Chongqing 400030, China.
Micromachines (Basel). 2023 Feb 2;14(2):374. doi: 10.3390/mi14020374.
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented.
在过去十年中，压电微机械超声换能器（pMUT）测距仪得到了迅速发展。由于具有高输出压力以实现远距离检测且功耗低（据报道，在超过1米的距离检测时功耗为16微瓦），pMUT测距仪在移动测距方面受到了广泛关注。人们已经开发出了具有不同策略来提高测距性能的pMUT测距仪，包括利用pMUT阵列、先进的器件结构和新型压电材料，以及改进测距方法。本文简要介绍了pMUT测距仪的工作原理，然后广泛概述了提高pMUT测距仪性能的最新进展，包括先进的pMUT器件以及pMUT测距仪系统中使用的测距方法。最后，介绍了几种pMUT测距仪的衍生系统，使pMUT测距仪能够应用于更广泛的领域。
