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用于共溅射条件以获得化学计量比的CZTS薄膜的数学模型的建立与验证:使用全金属硫化物靶材的便利性

Formulation and validation of mathematical model for co-sputtering conditions to attain stoichiometric CZTS films: Expedience of using all metal sulfide targets.

作者信息

Sultana Munira, Sharmin Afrina, Alam Md Rashed, Ahmed Shahran, Ali Shaikh Md Aftab, Bashar M S

机构信息

Bangladesh Council of Scientific and Industrial Research (BCSIR), Bangladesh.

出版信息

Heliyon. 2025 Jan 9;11(2):e41758. doi: 10.1016/j.heliyon.2025.e41758. eCollection 2025 Jan 30.

Abstract

A soda lime glass substrate is used for fabricating CuZnSnS (CZTS) thin films using copper (II) sulfide (CuS), zinc sulfide (ZnS), and tin sulfide (SnS) targets using an advanced co-sputtering deposition process. Following that, the films are annealed at 470 °C without sulfur (S). An algorithm based on the deposition rate of the previously specified targets set the co-sputtering condition, which maintains a deposition pressure of 5, 10, 15, and 20 mTorr. When studied at different deposition pressures, carrier concentration, resistivity, band gap, and crystallite size show significant correlations. The systematic variation of deposition pressure (5-20 mTorr) shows a constant increase in crystallite size. Resistivity decreases with pressure, but the band gap rises. The film has the highest resistivity at 5 mTorr Argon (Ar) deposition pressure and the highest carrier concentration at 10 mTorr. The EDX study shows that annealed films have a good stoichiometric ratio without sulfurization. Stoichiometry control, energy economy, and process simplicity improve when sulfurization is skipped for CZTS manufacturing. The findings explain correlations according to the intended use, thus experimentalists in this field will be interested in them.

摘要

采用先进的共溅射沉积工艺,使用硫化铜(CuS)、硫化锌(ZnS)和硫化锡(SnS)靶材,在钠钙玻璃衬底上制备铜锌锡硫(CZTS)薄膜。随后,薄膜在470°C下进行无硫退火。基于先前指定靶材的沉积速率的算法设定了共溅射条件,该条件维持5、10、15和20毫托的沉积压力。在不同沉积压力下进行研究时,载流子浓度、电阻率、带隙和微晶尺寸显示出显著的相关性。沉积压力(5 - 20毫托)的系统变化显示微晶尺寸持续增加。电阻率随压力降低,但带隙升高。该薄膜在5毫托氩气(Ar)沉积压力下具有最高电阻率,在10毫托下具有最高载流子浓度。能谱分析(EDX)研究表明,退火后的薄膜具有良好的化学计量比,无需硫化。在CZTS制造过程中跳过硫化步骤时,化学计量控制、能源经济性和工艺简单性均得到改善。这些发现根据预期用途解释了相关性,因此该领域的实验人员会对其感兴趣。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f3a/11773011/60569e1c2343/ga1.jpg

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