Hu Haotian, Calusi Benedetta, Bagolini Alvise, Pantano Maria F
Department of Civil, Environmental and Mechanical Engineering, University of Trento, Via Mesiano 77, 38123 Trento, Italy.
Center for Sensors and Devices, Fondazione Bruno Kessler, Via Sommarive 18, 38123 Trento, Italy.
Micromachines (Basel). 2025 Feb 8;16(2):195. doi: 10.3390/mi16020195.
This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG's mechanical sensitivity. This approach was evaluated using both theoretical modeling and finite element analysis (FEA), and the results showed a high degree of agreement between the two methods. A conventional TFG having a comparable area was also designed and analyzed for comparison purposes. By introducing the displacement amplification mechanism, the proposed MEMS TFG design provides an output displacement about 2.5 times higher than the conventional design, according to the computation, without increasing the device footprint. Theoretical analysis and FEA on the TFG with amplification and a conventional TFG confirmed that the amplified displacement significantly improves the mechanical sensitivity of the gyroscope compared to conventional TFG designs.
本文描述了一种新型的微机电系统（MEMS）音叉陀螺仪（TFG）设计，该设计采用人字形位移机构来放大科里奥利力产生的位移，从而提高TFG的机械灵敏度。使用理论建模和有限元分析（FEA）对该方法进行了评估，结果表明这两种方法高度一致。为了进行比较，还设计并分析了具有可比面积的传统TFG。通过引入位移放大机构，根据计算，所提出的MEMS TFG设计在不增加器件占地面积的情况下，提供的输出位移比传统设计高约2.5倍。对具有放大功能的TFG和传统TFG的理论分析和FEA证实，与传统TFG设计相比，放大后的位移显著提高了陀螺仪的机械灵敏度。
