Zhang Kunpeng, Wang Sai, Hao Shuying, Zhang Qichang, Feng Jingjing
Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China.
National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China.
Micromachines (Basel). 2022 Jul 28;13(8):1201. doi: 10.3390/mi13081201.
In this paper, we apply the leverage amplification principle to improve the gain of a three-degrees-of-freedom (3-DoF) micro-gyro. The gain of the micro-gyro can be improved by designing linear and nonlinear micro-gyros with an anchored lever mechanism (ALM). First, the sensor system of the micro-gyro is designed as a complete 2-DOF system with an ALM. The effect of the leverage rate (LR) on the mass ratio and frequency coupling parameter (FCP) of the complete 2-DOF sense system is studied. We analyze the variation rule of the gain of the lever's input and output as the LR increases. Afterwards, the bandwidth and gain performance of linear and nonlinear micro-gyros with an ALM is investigated by applying the arbitrarily tunable characteristics of peak spacing of the complete 2-DOF system. The influence of LR, FCP, nonlinear strength, damping, and peak spacing on bandwidth and gain of the 3-DOF micro-gyro is analyzed. The results indicate that both LR and FCP have a large effect on the gain and bandwidth of a micro-gyro with an ALM. The LR parameter mainly improves the gain of the micro-gyro, and the FCP parameter mainly adjusts the bandwidth performance. Adding levers can effectively improve the gain performance of the linear micro-gyro. The linear micro-gyro with an ALM can improve the gain by 4.5 dB compared to the one without an ALM. The nonlinear micro-gyro with an ALM combines two characteristics: the nonlinear micro-gyro can improve the bandwidth, while the lever structure can improve the gain. Compared with the linear micro-gyro without an ALM, the gain can be increased by 17.6 dB, and the bandwidth can be improved as well. In addition, the bandwidth of a micro-gyro with an ALM is related to the gain difference between the peaks of the lever output. The increase in the gain difference leads to a flattening of the left peak, which effectively broadens the bandwidth. For nonlinear micro-gyros with an ALM, the bandwidth can be further improved by increasing the nonlinear stiffness coefficient, and better gain and bandwidth can be obtained using a vacuum package.
在本文中，我们应用杠杆放大原理来提高三自由度（3-DoF）微陀螺仪的增益。通过设计带有锚定杠杆机构（ALM）的线性和非线性微陀螺仪，可以提高微陀螺仪的增益。首先，将微陀螺仪的传感系统设计为带有ALM的完整二自由度系统。研究了杠杆率（LR）对完整二自由度传感系统的质量比和频率耦合参数（FCP）的影响。我们分析了随着LR增加，杠杆输入和输出增益的变化规律。之后，通过应用完整二自由度系统峰间距的任意可调特性，研究了带有ALM的线性和非线性微陀螺仪的带宽和增益性能。分析了LR、FCP、非线性强度、阻尼和峰间距对3-DoF微陀螺仪带宽和增益的影响。结果表明，LR和FCP对带有ALM的微陀螺仪的增益和带宽都有很大影响。LR参数主要提高微陀螺仪的增益，而FCP参数主要调整带宽性能。添加杠杆可以有效提高线性微陀螺仪的增益性能。带有ALM的线性微陀螺仪与不带ALM的相比，增益可提高4.5 dB。带有ALM的非线性微陀螺仪结合了两个特性：非线性微陀螺仪可以提高带宽，而杠杆结构可以提高增益。与不带ALM的线性微陀螺仪相比，增益可提高17.6 dB，带宽也可以得到改善。此外，带有ALM的微陀螺仪的带宽与杠杆输出峰值之间的增益差有关。增益差的增加导致左峰变平，从而有效地拓宽了带宽。对于带有ALM的非线性微陀螺仪，通过增加非线性刚度系数可以进一步提高带宽，并且使用真空封装可以获得更好的增益和带宽。
