Wang Jianguo, Wang Binbin, Qu Junling, Zhang Yanyan, Zhao Chenyang, Wang Jie, Fang Liang, Zhao Jianlin, Gan Xuetao
Opt Lett. 2025 Mar 15;50(6):2057-2060. doi: 10.1364/OL.555906.
We demonstrate significant second harmonic generation (SHG) and sum frequency generation (SFG) on a thin-film lithium niobate (TFLN) platform by loading a silicon nitride (SiN) microring resonator, which avoids the dry etching of lithium niobate. By optimizing SiN-loaded TFLN waveguide geometry, the phase-matching conditions between the fundamental pump laser and the SHG/SFG signals are designed. Combining with enhancement by the microring resonator, remarkable SHG and SFG signals with conversion efficiencies of 16.43%/W and 5.90%/W are realized, respectively. Compared to traditional TFLN photonic platform, this CMOS-compatible strategy offers an opportunity for achieving large-scale on-chip nonlinear photonic devices based on TFLN.
我们通过加载氮化硅（SiN）微环谐振器，在薄膜铌酸锂（TFLN）平台上展示了显著的二次谐波产生（SHG）和和频产生（SFG），这避免了铌酸锂的干法蚀刻。通过优化加载SiN的TFLN波导几何结构，设计了基频泵浦激光与SHG/SFG信号之间的相位匹配条件。结合微环谐振器的增强作用，分别实现了转换效率为16.43%/W和5.90%/W的显著SHG和SFG信号。与传统的TFLN光子平台相比，这种与CMOS兼容的策略为基于TFLN实现大规模片上非线性光子器件提供了机会。
