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多光束多层X射线叠层成像术

Multi-beam multi-slice X-ray ptychography.

作者信息

Åstrand Mattias, Vogt Ulrich, Yang Runqing, Villanueva Perez Pablo, Li Tang, Lyubomirskiy Mikhail, Kahnt Maik

机构信息

KTH Royal Institute of Technology, Department of Applied Physics, Bio-Opto-Nano Physics, Albanova University Center, 106 91, Stockholm, Sweden.

MAX IV Laboratory, Lund University, Box 118, 221 00, Lund, Sweden.

出版信息

Sci Rep. 2025 Mar 18;15(1):9273. doi: 10.1038/s41598-025-93757-0.

DOI:10.1038/s41598-025-93757-0
PMID:40102622
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11920106/
Abstract

X-ray ptychography provides the highest resolution non-destructive imaging at synchrotron radiation facilities, and the efficiency of this method is crucial for coping with limited experimental time. Recent advancements in multi-beam ptychography have enabled larger fields of view, but spatial resolution for large 3D samples remains constrained by their thickness, requiring consideration of multiple scattering events. Although this challenge has been addressed using multi-slicing in conventional ptychography, the integration of multi-slicing with multi-beam ptychography has not yet been explored. Here we present the first successful combination of these two methods, enabling high-resolution imaging of nanofeatures at depths comparable to the lateral dimensions that can be addressed by state-of-the-art multi-beam ptychography. Our approach is robust, reproducible across different beamlines, and ready for broader application. It marks a significant advancement in the field, establishing a new foundation for high-resolution 3D imaging of larger, thicker samples.

摘要

X射线叠层成像技术在同步辐射装置中提供了最高分辨率的无损成像,该方法的效率对于应对有限的实验时间至关重要。多光束叠层成像技术的最新进展使得视野更大,但大型三维样品的空间分辨率仍受其厚度限制,需要考虑多次散射事件。尽管在传统叠层成像中使用多切片方法解决了这一挑战,但多切片与多光束叠层成像的结合尚未得到探索。在此,我们展示了这两种方法的首次成功结合,能够对深度与横向尺寸相当的纳米特征进行高分辨率成像,而横向尺寸可通过最先进的多光束叠层成像技术实现。我们的方法稳健,可在不同光束线上重复,并且随时可广泛应用。它标志着该领域的重大进展,为更大、更厚样品的高分辨率三维成像奠定了新基础。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/a0115a7795aa/41598_2025_93757_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/39458be05f35/41598_2025_93757_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/df4a0169c3ec/41598_2025_93757_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/a0115a7795aa/41598_2025_93757_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/39458be05f35/41598_2025_93757_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/df4a0169c3ec/41598_2025_93757_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ace/11920106/a0115a7795aa/41598_2025_93757_Fig3_HTML.jpg

相似文献

1
Multi-beam multi-slice X-ray ptychography.多光束多层X射线叠层成像术
Sci Rep. 2025 Mar 18;15(1):9273. doi: 10.1038/s41598-025-93757-0.
2
X-Ray Multibeam Ptychography at up to 20 keV: Nano-Lithography Enhances X-Ray Nano-Imaging.高达20keV的X射线多束叠层成像术:纳米光刻增强X射线纳米成像
Adv Sci (Weinh). 2024 Aug;11(30):e2310075. doi: 10.1002/advs.202310075. Epub 2024 Jun 23.
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4
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Near-field multi-slice ptychography: quantitative phase imaging of optically thick samples with visible light and X-rays.近场多切片叠层术:利用可见光和 X 射线对厚光学样品进行定量相位成像。
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本文引用的文献

1
Computational microscopy with coherent diffractive imaging and ptychography.基于相干衍射成像和叠层成像术的计算显微镜技术。
Nature. 2025 Jan;637(8045):281-295. doi: 10.1038/s41586-024-08278-z. Epub 2025 Jan 8.
2
Adaptive multi-beam X-ray ptychography.
Opt Express. 2024 Jun 17;32(13):22771-22780. doi: 10.1364/OE.509813.
3
High-performance 4-nm-resolution X-ray tomography using burst ptychography.利用爆发式叠层相位成像术实现高性能 4nm 分辨率 X 射线断层摄影。
Nature. 2024 Aug;632(8023):81-88. doi: 10.1038/s41586-024-07615-6. Epub 2024 Jul 31.
4
X-Ray Multibeam Ptychography at up to 20 keV: Nano-Lithography Enhances X-Ray Nano-Imaging.高达20keV的X射线多束叠层成像术:纳米光刻增强X射线纳米成像
Adv Sci (Weinh). 2024 Aug;11(30):e2310075. doi: 10.1002/advs.202310075. Epub 2024 Jun 23.
5
EIGER2 hybrid-photon-counting X-ray detectors for advanced synchrotron diffraction experiments.EIGER2 混合式光子计数 X 射线探测器,适用于先进的同步辐射衍射实验。
J Synchrotron Radiat. 2023 Jul 1;30(Pt 4):723-738. doi: 10.1107/S160057752300454X. Epub 2023 Jun 21.
6
Near-field multi-slice ptychography: quantitative phase imaging of optically thick samples with visible light and X-rays.近场多切片叠层术:利用可见光和 X 射线对厚光学样品进行定量相位成像。
Opt Express. 2023 May 8;31(10):15791-15809. doi: 10.1364/OE.487002.
7
Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples.使用编码探针的多光束X射线叠层成像术用于对扩展样本进行快速无损高分辨率成像。
Sci Rep. 2022 Apr 13;12(1):6203. doi: 10.1038/s41598-022-09466-5.
8
Miniaturized Sulfite-Based Gold Bath for Controlled Electroplating of Zone Plate Nanostructures.
Micromachines (Basel). 2022 Mar 17;13(3):452. doi: 10.3390/mi13030452.
9
NanoMAX: the hard X-ray nanoprobe beamline at the MAX IV Laboratory.纳米MAX:马克斯·IV实验室的硬X射线纳米探针光束线。
J Synchrotron Radiat. 2021 Nov 1;28(Pt 6):1935-1947. doi: 10.1107/S1600577521008213. Epub 2021 Oct 5.
10
Multi-slice ptychography enables high-resolution measurements in extended chemical reactors.多切片叠层成像技术能够在大型化学反应器中进行高分辨率测量。
Sci Rep. 2021 Jan 15;11(1):1500. doi: 10.1038/s41598-020-80926-6.