Fabrication of TiO Nanotube Arrays by Progressive Anodization of Ti Thin Film on Insulated Substrates.

Titanium (Ti) thin films deposited on insulated substrates were progressively anodized and formed titanium dioxide (TiO) nanotube arrays on the surface through a customized anodization tool designed to improve the uniformity and diameters of the nanotubes. With a motorized vertical moving arm attached to the anode, the sample was gradually submerged into the electrolyte at a controlled speed alongside the continuous anodization from the edge to the center to prevent the discontinuation of the conductive Ti layer and its nanotube surface. The effects of Ti deposition rate, anodization voltage, NHF concentration, and post-etching conditions on nanotube morphology were also explored. Scanning electron microscopy (SEM) analysis revealed that smaller Ti grain sizes, higher anodization voltages, higher electrolyte concentrations, and optimized post-etching times produce uniform, mature nanotubes with larger diameters, which are crucial for practical applications. This work enhances the applicability of nanotube surfaces with non-conductive substrates, such as Zirconia dental implants, and establishes a foundation for future process optimizations.