Zhao Guangyuan, Li Xin, Liu Zhihui
School of Physics, Shandong University, Jinan 250100, China.
Sinopec Qilu Petrochemical Company, Zibo 255400, China.
Micromachines (Basel). 2025 Feb 22;16(3):249. doi: 10.3390/mi16030249.
Thin-film thermocouple is widely used in temperature measurement because of its high temperature measurement accuracy and small size. In order to calibrate the temperature accurately with thin-film thermocouple, NiCr/NiSi thin-film thermocouple was prepared by magnetron sputtering according to the Seebeck effect. Through static calibration experiments, the Seebeck coefficient of K-wire thermocouple was found to be 39.23 μV/°C, while that of the NiCr/NiSi thin-film thermocouple was 38.89 μV/°C. Further experiments showed a Seebeck coefficient of 39.092 μV/°C for the NiCr/NiSi thin-film thermocouple, which verifies that the prepared thin-film thermocouple has good consistency and repeatability. Through the temperature measurement experiment of automobile engines, the highest stable working temperature of the engine is 107.9 °C, which further verifies that the prepared NiCr/NiSi thin-film thermocouple can have a sensitive dynamic response to temperature and high temperature measurement accuracy. Finally, the causes of experimental errors, the application prospect and existing problems of thin-film thermocouples are analyzed.
薄膜热电偶因其高温测量精度高和尺寸小而被广泛应用于温度测量。为了用薄膜热电偶精确校准温度，根据塞贝克效应，通过磁控溅射制备了NiCr/NiSi薄膜热电偶。通过静态校准实验，发现K型丝热电偶的塞贝克系数为39.23 μV/°C，而NiCr/NiSi薄膜热电偶的塞贝克系数为38.89 μV/°C。进一步的实验表明，NiCr/NiSi薄膜热电偶的塞贝克系数为39.092 μV/°C，这验证了所制备的薄膜热电偶具有良好的一致性和重复性。通过汽车发动机的温度测量实验，发动机的最高稳定工作温度为107.9 °C，这进一步验证了所制备的NiCr/NiSi薄膜热电偶对温度具有灵敏的动态响应和高温测量精度。最后，分析了实验误差的原因、薄膜热电偶的应用前景和存在的问题。
