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基于闭环TMR电流传感器的磁屏蔽结构设计与仿真

Design and Simulation of Magnetic Shielding Structure Based on Closed-Loop TMR Current Sensor.

作者信息

Li Qiuyang, Xiong Suqin, Wang Shuo, Dong Xianguang, Zhang Haifeng

机构信息

China Electric Power Research Institute Co., Ltd., Beijing 100192, China.

MEMS Center, Harbin Institute of Technology, Harbin 150001, China.

出版信息

Micromachines (Basel). 2025 Feb 27;16(3):272. doi: 10.3390/mi16030272.

DOI:10.3390/mi16030272
PMID:40141883
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11944719/
Abstract

With the rapid development of current sensor technology, tunnel magnetoresistance (TMR) current sensors have been widely adopted in industrial detection due to their high sensitivity, excellent linearity, and broad measurement range. This study focuses on closed-loop TMR current sensors, utilizing COMSOL Multiphysics 6.2 software and the finite element method to conduct an in-depth analysis of structural parameters affecting sensor sensitivity. A novel magnetic shielding package architecture is proposed and designed. Simulation results demonstrate that the shielding efficiency of this structure improves by 44.3% compared to a single magnetic ring under a stray magnetic field of 0.1 mT along the sensing axis. At the same time, the measurement accuracy is 2.1 times higher than that of traditional structures. Current detection experiments conducted in a strong magnetic field environment further validate that the shielding package effectively suppresses external electromagnetic interference, significantly enhancing sensor stability and measurement accuracy. This research provides important theoretical and practical insights for applying high-precision TMR current sensors in complex electromagnetic environments.

摘要

随着当前传感器技术的快速发展，隧道磁电阻（TMR）电流传感器因其高灵敏度、优异的线性度和宽广的测量范围而在工业检测中得到广泛应用。本研究聚焦于闭环TMR电流传感器，利用COMSOL Multiphysics 6.2软件和有限元方法对影响传感器灵敏度的结构参数进行深入分析。提出并设计了一种新型磁屏蔽封装架构。仿真结果表明，在沿传感轴方向0.1 mT的杂散磁场下，该结构的屏蔽效率比单个磁环提高了44.3%。同时，测量精度比传统结构高2.1倍。在强磁场环境下进行的电流检测实验进一步验证了该屏蔽封装有效抑制了外部电磁干扰，显著提高了传感器的稳定性和测量精度。本研究为高精度TMR电流传感器在复杂电磁环境中的应用提供了重要的理论和实践见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/cbd36c334469/micromachines-16-00272-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/e63520ac8c95/micromachines-16-00272-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/6bc79f7cde7a/micromachines-16-00272-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/616239431e10/micromachines-16-00272-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/a01911708a5d/micromachines-16-00272-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/1e12dca90461/micromachines-16-00272-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/1eb290769099/micromachines-16-00272-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/0500c4fd92ef/micromachines-16-00272-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/0f42be2040c9/micromachines-16-00272-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/98db2693b1a8/micromachines-16-00272-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/51a345d4ebfd/micromachines-16-00272-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/2506d26df67c/micromachines-16-00272-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/cbd36c334469/micromachines-16-00272-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/e63520ac8c95/micromachines-16-00272-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/6bc79f7cde7a/micromachines-16-00272-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/616239431e10/micromachines-16-00272-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/a01911708a5d/micromachines-16-00272-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/1e12dca90461/micromachines-16-00272-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/1eb290769099/micromachines-16-00272-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/0500c4fd92ef/micromachines-16-00272-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/0f42be2040c9/micromachines-16-00272-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/98db2693b1a8/micromachines-16-00272-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/51a345d4ebfd/micromachines-16-00272-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/2506d26df67c/micromachines-16-00272-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/223d/11944719/cbd36c334469/micromachines-16-00272-g012.jpg

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本文引用的文献

1
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Micromachines (Basel). 2024 Nov 22;15(12):1407. doi: 10.3390/mi15121407.
2
Optimal design of dual air-gap closed-loop TMR current sensor based on minimum magnetic field uniformity coefficient.基于最小磁场均匀性系数的双气隙闭环 TMR 电流传感器的优化设计。
Sci Rep. 2023 Jan 5;13(1):239. doi: 10.1038/s41598-022-26971-9.