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基于自支撑铁电氧化物薄膜的超高功率密度柔性压电能量收集器。

Ultrahigh-power-density flexible piezoelectric energy harvester based on freestanding ferroelectric oxide thin films.

作者信息

Ren Zhongqi, Deng Shiqing, Shao Junda, Si Yangyang, Zhou Chao, Luo Jingjing, Wang Tao, Li Jinyang, Li Jingxuan, Liu Haipeng, Qi Xue, Wang Peike, Yin Ao, Wu Lijun, Yu Suzhu, Zhu Yimei, Chen Jun, Das Sujit, Wei Jun, Chen Zuhuang

机构信息

State Key Laboratory of Advanced Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen, 518055, P.R. China.

Beijing Advanced Innovation Center for Materials Genome Engineering, University of Science and Technology Beijing, Beijing, 100083, P.R. China.

出版信息

Nat Commun. 2025 Apr 3;16(1):3192. doi: 10.1038/s41467-025-58386-1.

DOI:10.1038/s41467-025-58386-1
PMID:40180966
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11968794/
Abstract

Flexible piezoelectric nanogenerators are emerging as a promising solution for powering next-generation flexible electronics by converting mechanical energy into electrical energy. However, traditional ferroelectric ceramics, despite their excellent piezoelectric properties, lack flexibility; while piezoelectric polymers, although highly flexible, have low piezoelectricity. The quest to develop materials that combine high piezoelectricity with exceptional flexibility has thus become a research focus. Herein, we present a breakthrough in this field with the fabrication of freestanding (111)-oriented PbZrTiO single crystalline thin films, which exhibit remarkable flexibility and a high converse piezoelectric coefficient (585 pm/V). This is achieved through water-soluble sacrificial layer to relieve substrate clamping and controlling the crystal orientation to further enhance the piezoelectric response. Our nanogenerators, constructed using these freestanding nanoscale membranes, demonstrate a record-high output power density (63.5 mW/cm), excellent flexibility (with a strain tolerance >3.4%), and superior mechanical stability in cycling tests (>60,000 cycles). These advancements pave the way for high-performance, flexible electronic devices utilizing ferroelectric oxide thin films.

摘要

柔性压电纳米发电机正崭露头角,成为通过将机械能转化为电能为下一代柔性电子产品供电的一种很有前景的解决方案。然而,传统铁电陶瓷尽管具有优异的压电性能,却缺乏柔韧性;而压电聚合物虽然具有高度柔韧性,但压电性较低。因此,开发兼具高压电性和卓越柔韧性的材料已成为研究重点。在此,我们通过制备独立的(111)取向的PbZrTiO单晶薄膜在该领域取得了突破,该薄膜展现出卓越的柔韧性和高的逆压电系数(约585 pm/V)。这是通过水溶性牺牲层来减轻衬底夹持并控制晶体取向以进一步增强压电响应来实现的。我们使用这些独立的纳米级薄膜构建的纳米发电机展现出创纪录的高输出功率密度(约6 mW/cm)、优异的柔韧性(应变耐受性>3.4%)以及在循环测试中出色的机械稳定性(>60,000次循环)。这些进展为利用铁电氧化物薄膜的高性能柔性电子器件铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/224c5671378e/41467_2025_58386_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/36bbd8c8d494/41467_2025_58386_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/e5fc83699481/41467_2025_58386_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/df09826788c5/41467_2025_58386_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/7e2063d5421a/41467_2025_58386_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/0b882880c51a/41467_2025_58386_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/224c5671378e/41467_2025_58386_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/36bbd8c8d494/41467_2025_58386_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/e5fc83699481/41467_2025_58386_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/df09826788c5/41467_2025_58386_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/7e2063d5421a/41467_2025_58386_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/0b882880c51a/41467_2025_58386_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/510f/11968794/224c5671378e/41467_2025_58386_Fig6_HTML.jpg

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本文引用的文献

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Two-Dimensional Layered Materials Meet Perovskite Oxides: A Combination for High-Performance Electronic Devices.二维层状材料与钙钛矿氧化物相遇:高性能电子器件的组合。
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High-precision and linear weight updates by subnanosecond pulses in ferroelectric tunnel junction for neuro-inspired computing.用于神经形态计算的铁电隧道结中通过亚纳秒脉冲实现的高精度和线性权重更新。
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Strain-induced room-temperature ferroelectricity in SrTiO membranes.
应变诱导的SrTiO薄膜中的室温铁电性。
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Large piezoelectric strain with ultra-low strain hysteresis in highly c-axis oriented Pb(ZrTi)O films with columnar growth on amorphous glass substrates.在非晶玻璃衬底上具有柱状生长的高度c轴取向的Pb(ZrTi)O薄膜中,实现了具有超低应变滞后的大压电应变。
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