利用多层分布式布拉格反射镜（DBR）和微透镜结构优化谐振腔微发光二极管中的色散角

Optimization of dispersion angle in resonant cavity micro-light-emitting diode using multilayer DBR and microlens structures.

作者信息

Lee Tzu-Yi, Huang Chien-Chi, Hsiao Fu-He, Sher Chin-Wei, Lin Gong-Ru, Chen Li-Yin, Chen Fang-Chung, Lin Chia-Feng, He Jr-Hau, Hong Kuo-Bin, Hong Yu-Heng, Kuo Hao-Chung

机构信息

Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.

Semiconductor Research Center, Hon Hai Research Institute, Taipei, 11492, Taiwan.

出版信息

Discov Nano. 2025 Apr 4;20(1):67. doi: 10.1186/s11671-025-04219-5.

DOI:10.1186/s11671-025-04219-5

PMID:40183876

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11971102/

Abstract

In this paper, the fabrication and the corresponding performance characteristics of resonant cavity micro-light-emitting diodes (RC-μ-LEDs) are examined, with particular emphasis placed on reducing the light emission angle to enhance their application efficiency. A stepped quantum well structure and a multilayer aperture distributed Bragg reflector (DBR) are used to reduce the light emission angle, and two different approaches are investigated: one is by adding a multilayer DBR structure, and the other is by incorporating a microlens (ML) structure. The experimental results show that both adjusting the DBR cycles and adding microlenses can effectively reduce the dispersion angle of light emission, and thus improving the directionality of light, wavelength stability, and the overall device performance. Such highly directional light sources offer great solutions for optical communications, micro-LEDs, and augmented reality (AR) applications.

摘要

本文研究了谐振腔微发光二极管（RC-μ-LED）的制造及其相应的性能特性，特别强调了减小发光角度以提高其应用效率。采用阶梯量子阱结构和多层孔径分布布拉格反射器（DBR）来减小发光角度，并研究了两种不同的方法：一种是添加多层DBR结构，另一种是并入微透镜（ML）结构。实验结果表明，调整DBR周期和添加微透镜都可以有效地减小发光的色散角，从而改善光的方向性、波长稳定性和整体器件性能。这种高定向光源为光通信、微型发光二极管和增强现实（AR）应用提供了很好的解决方案。