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基于氮化镓的高性能绿色谐振腔发光二极管,带有银底镜。

High-performance GaN-based green resonant cavity-light emitting diodes with an Ag bottom mirror.

作者信息

Ma Mingshuang, Yang Shuai, Ying Leiying, Bu Yikun, Mei Yang, Zhang Baoping

出版信息

Opt Lett. 2025 Apr 15;50(8):2763-2766. doi: 10.1364/OL.558166.

Abstract

Green resonant cavity light-emitting diodes (RCLEDs) are important components in optical communication and display applications. However, the light output power (LOP) is usually limited. In this study, GaN-based green RCLEDs with a large chip size (900 × 900 μm) have been fabricated using a silver (Ag) metal mirror as the bottom reflector and a dielectric distributed Bragg reflector (DBR) as the top reflector. The device is characterized by a small spectral linewidth (3.0 nm) and divergence angle (95°) when compared with standard LEDs, which is attributed to the cavity effect. The turn-on voltage is 2.3 V at an injection current of 20 mA, with a LOP of 180 mW at a current density of 197 A/cm, which is the highest LOP reported to date for green RCLEDs. The Ag bottom mirror can not only enhance the cavity effect but also improve heat dissipation and electrical injection. The utilization of array configuration for the n-side electrode has not only enabled uniform current injection but has also maximized the light output area that contributes to the high LOP.

摘要

绿色共振腔发光二极管(RCLED)是光通信和显示应用中的重要组件。然而,其光输出功率(LOP)通常受到限制。在本研究中,采用银(Ag)金属镜作为底部反射器、介质分布式布拉格反射器(DBR)作为顶部反射器,制备了具有大芯片尺寸(900×900μm)的基于氮化镓的绿色RCLED。与标准发光二极管相比,该器件具有小的光谱线宽(3.0nm)和发散角(95°),这归因于腔效应。在20mA注入电流下,开启电压为2.3V,在197A/cm²的电流密度下,光输出功率为180mW,这是迄今为止报道的绿色RCLED的最高光输出功率。Ag底部镜不仅可以增强腔效应,还可以改善散热和电注入。n侧电极采用阵列配置不仅实现了均匀的电流注入,还最大化了有助于高光输出功率的光输出面积。

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