一种基于新型/的压电复合薄膜的仿生蜂窝微机电系统水听器。

A Novel /-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone.

作者信息

Meng Fansheng, Zhang Chaoshuai, Zhang Guojun, Wang Renxin, He Changde, Yang Yuhua, Cui Jiangong, Zhang Wendong, Jia Licheng

机构信息

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2025 Apr 11;16(4):454. doi: 10.3390/mi16040454.

DOI:10.3390/mi16040454

PMID:40283329

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12029404/

Abstract

An innovative design of a hydrophone based on a piezoelectric composite film of AlN/Sc0.2Al0.8N is presented. By designing a non-uniform composite sensitive layer, the dielectric loss and defect density are significantly reduced, while the high-voltage electrical characteristics of scandium-doped aluminum nitride are retained. X-ray diffraction analysis shows that the sensitive films have excellent crystal quality (FWHM is 0.34°). According to the standard underwater acoustic calibration test, the device exhibits full directivity with a minimum deviation of ±0.5 dB at 1 kHz frequency, sound pressure sensitivity of -162.9 dB (re: 1 V/μPa) and equivalent noise density of 46.1 dB (re: 1 μPa/Hz). The experimental results show that the comprehensive performance of the piezoelectric heterostructure hydrophone meets the standard of commercial high-end hydrophones while maintaining mechanical stability, and provides a new solution for underwater acoustic sensing.

摘要

提出了一种基于AlN/Sc0.2Al0.8N压电复合薄膜的水听器创新设计。通过设计非均匀复合敏感层，显著降低了介电损耗和缺陷密度，同时保留了掺钪氮化铝的高压电学特性。X射线衍射分析表明，敏感薄膜具有优异的晶体质量（半高宽为0.34°）。根据标准水下声学校准测试，该器件在1 kHz频率下呈现全指向性，最小偏差为±0.5 dB，声压灵敏度为-162.9 dB（相对于1 V/μPa），等效噪声密度为46.1 dB（相对于1 μPa/Hz）。实验结果表明，该压电异质结构水听器的综合性能在保持机械稳定性的同时满足了商业高端水听器的标准，并为水下声学传感提供了一种新的解决方案。