Wang Jiaqi, Zhang Hui, Chen Si, Zhang Zunyue, Wu Guoxian, Li Xu, Ding Penghao, Tan Chuxian, Du Yu, Geng Youfu, Li Xuejin, Tsang Hon Ki, Cheng Zhenzhou
College of Physics and Optoelectronic Engineering, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China.
School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China.
ACS Sens. 2025 Jul 25;10(7):4938-4944. doi: 10.1021/acssensors.5c00568. Epub 2025 May 5.
Silicon microring resonators (MRRs) are promising for on-chip optical gas sensing due to their strong light-matter interaction, compact footprint, and mass-scalable fabrication potential. However, for refractive index sensors, it is essential to consider the cross-sensitivity to temperature induced by the thermal-optic effect in MRRs. To address this challenge, we demonstrate a silicon MRR coated with gas-sensitive polyhexamethylene biguanide hydrochloride as the upper cladding for carbon dioxide sensing. The engineered MRR exhibits distinct temperature and gas sensitivities for TE and TE modes. With the linear independent responses, a gas sensitivity of -0.90 pm/ppm within a range of 700 ppm is demonstrated in conjunction with the temperature compensation. The response and recovery times of gas sensing are measured as ∼3.5 and 1.5 min. Our study paves the way for on-chip optical gas sensing with temperature compensation.
硅微环谐振器（MRR）因其强烈的光与物质相互作用、紧凑的尺寸以及大规模可扩展的制造潜力，在片上光学气体传感方面具有广阔前景。然而，对于折射率传感器而言，必须考虑MRR中热光效应所引起的对温度的交叉敏感性。为应对这一挑战，我们展示了一种涂覆有对气体敏感的聚六亚甲基双胍盐酸盐作为上包层的硅MRR，用于二氧化碳传感。经过设计的MRR对TE和TE模式表现出不同的温度和气体敏感性。凭借线性独立响应，在700 ppm范围内结合温度补偿展示出-0.90 pm/ppm的气体灵敏度。气体传感的响应和恢复时间分别测量为约3.5分钟和1.5分钟。我们的研究为具有温度补偿的片上光学气体传感铺平了道路。
