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用于温度和折射率传感且具有扩展温度范围的双模光学传感器的数值研究

Numerical Study of a Dual-Mode Optical Sensor for Temperature and Refractive Index Sensing with Enhanced Temperature Range.

作者信息

Qadir Muhammad Favad, Zakwan Muhammad, Shahid Saleem, Rana Ahsan Sarwar, Ali Muhammad Mahmood, Bösch Wolfgang

机构信息

Department of Electrical and Computer Engineering, Air University, Islamabad 44230, Pakistan.

Faculty of Engineering and Computing, Department of Electrical Engineering, National University of Modern Languages, Islamabad 44000, Pakistan.

出版信息

Sensors (Basel). 2025 Jun 26;25(13):3999. doi: 10.3390/s25133999.

DOI:10.3390/s25133999
PMID:40648255
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12251806/
Abstract

This study presents a photonic integrated optical sensor based on a dual-polarization microring resonator with angular gratings on a silicon-on-insulator (SOI) waveguide, enabling simultaneous and precise refractive index (RI) and temperature measurements. Due to the distinct energy distributions for transverse electric (TE) and transverse magnetic (TM) modes in SOI waveguides, these modes show distinct sensitivity responses to the variation in ambient RI and temperature. Simultaneous measurements of both temperature and RI are enabled by exciting both these transverse modes in the microring resonator structure. Furthermore, incorporating angular gratings into the microring resonator's inner sidewall extends the temperature measurement range by mitigating free spectral range limitations. This work presents a novel approach to dual-polarization microring resonators with angular gratings, offering an enhanced temperature measurement range and detection limit in optical sensing applications requiring an extended temperature range. The proposed structure is able to yield a simulated temperature measurement range of approximately 35 nm with a detection limit as low as 2.99×10-5. The achieved temperature sensitivity is 334 pm/°C and RI sensitivity is 13.33 nm/RIU for the TE0 mode, while the TM0 mode exhibits a temperature sensitivity of 260 pm/°C and an RI sensitivity of 76.66 nm/RIU.

摘要

本研究提出了一种基于绝缘体上硅（SOI）波导上带有角光栅的双偏振微环谐振器的光子集成光学传感器，能够同时精确测量折射率（RI）和温度。由于SOI波导中横向电（TE）和横向磁（TM）模式的能量分布不同，这些模式对环境RI和温度的变化表现出不同的灵敏度响应。通过在微环谐振器结构中激发这两种横向模式，可以同时测量温度和RI。此外，在微环谐振器的内侧壁上引入角光栅，通过减轻自由光谱范围限制来扩展温度测量范围。这项工作提出了一种带有角光栅的双偏振微环谐振器的新方法，在需要扩展温度范围的光学传感应用中提供了增强的温度测量范围和检测限。所提出的结构能够产生约35 nm的模拟温度测量范围，检测限低至2.99×10-5。对于TE0模式，实现的温度灵敏度为334 pm/°C，RI灵敏度为13.33 nm/RIU，而TM0模式的温度灵敏度为260 pm/°C，RI灵敏度为76.66 nm/RIU。

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