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通过溅射沉积制备用于超灵敏芥子气模拟物传感器的富氧空位WO多孔薄膜

Fabrication of Oxygen Vacancy-Rich WO Porous Thin Film by Sputter Deposition for Ultrasensitive Mustard-Gas Simulants Sensor.

作者信息

Li Haizhen, Yan Cancan, Shen Jun, Liu Shuai, Ma Qingyu, Zheng Yongchao

机构信息

School of Materials Science and Engineering, University of Jinan, Jinan 250022, China.

State Key Laboratory of Chemistry for NBC Hazards Protection, Beijing 102205, China.

出版信息

Sensors (Basel). 2025 May 12;25(10):3049. doi: 10.3390/s25103049.

DOI:10.3390/s25103049
PMID:40431844
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12115028/
Abstract

Exposure to sulfur mustard can result in severe injury or even fatalities in humans. Therefore, the development of reliable and high-performance sensors for detecting sulfur mustard is critical. Herein, WO thin films are prepared as sulfur mustard simulant (e.g., 2-chloroethyl ethylsulfide, 2-CEES) sensing materials using sputter deposition followed by high-temperature annealing. The 2-CEES gas sensors fabricated via WO porous films realize high-performance detection of 2-CEES at 260 °C with an impressive detection limit (15 ppb), fast response (58 s), long-term stability, and good selectivity. Through systematic optimization of deposition and annealing parameters, WO porous thin films with tailored oxygen vacancy concentrations were prepared, facilitating device fabrication. This approach provides an effective strategy for the batch production of miniaturized devices enabling real-time monitoring of vesicant agents.

摘要

接触硫芥可导致人类严重受伤甚至死亡。因此,开发可靠且高性能的硫芥检测传感器至关重要。在此,采用溅射沉积随后进行高温退火的方法制备WO薄膜作为硫芥模拟物(如2-氯乙基乙硫醚,2-CEES)传感材料。通过WO多孔膜制造的2-CEES气体传感器在260°C下实现了对2-CEES的高性能检测,具有令人印象深刻的检测限(15 ppb)、快速响应(58秒)、长期稳定性和良好的选择性。通过系统优化沉积和退火参数,制备了具有定制氧空位浓度的WO多孔薄膜,便于器件制造。这种方法为批量生产能够实时监测糜烂性毒剂的小型化器件提供了一种有效策略。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/5d57ccc17212/sensors-25-03049-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/7f1ecf416a70/sensors-25-03049-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/ff5ec70c5e5c/sensors-25-03049-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/a3c827cce067/sensors-25-03049-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/18b5bbb4c675/sensors-25-03049-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/b2d0033fc017/sensors-25-03049-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/5d57ccc17212/sensors-25-03049-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/7f1ecf416a70/sensors-25-03049-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/ff5ec70c5e5c/sensors-25-03049-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/a3c827cce067/sensors-25-03049-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/18b5bbb4c675/sensors-25-03049-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/b2d0033fc017/sensors-25-03049-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/298c/12115028/5d57ccc17212/sensors-25-03049-g007.jpg

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