Niu Kaixin, Gao Weiqi, Zhang Jinding, Li Siyu, Sun Xiaoyu, Xiao Yulong, Li Wanying, Ding Shuimei, Gao Jinghui, Wang Yiliu, Liu Yuan
Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education, School of Physics and Electronics, Hunan University, Changsha 410082 People's Republic of China.
Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, College of Materials Science and Engineering and Hunan Institute of Optoelectronic Integration, Hunan University, Changsha 410082, People's Republic of China.
ACS Nano. 2025 Jul 1;19(25):23235-23245. doi: 10.1021/acsnano.5c05556. Epub 2025 Jun 16.
With the rapid development of metal halide perovskites and their optoelectronics, a material-friendly and cost-effective patterning technique, typically through a top-down approach, is highly demanded to satisfy the requirements of device miniaturization and array formation. Here, a selective peeling methodology has been developed to pattern the high-quality perovskite film obtained via vapor-phase conversion in organic halide vapor of wafer-scale monocrystalline PbI epitaxially grown on muscovite. Owing to the layer-by-layer conversion of PbI, a perovskite-PbI vertical heterostructure film has been achieved. Leveraging the easily peeling characteristic of layered PbI, a prepatterned PDMS stamper with designed geometries was applied to the heterostructure film, selectively peeling the underlying PbI sheets in the contact region and realizing precise patterning of the top MAPbI layer at room temperature without additional treatments. Photodetector arrays have been integrated by the lamination of Au electrode pairs, with dark current suppressed by both the energy band alignment of the MAPbI-PbI heterostructure and the isolation of mesas by the selective peeling approach; meanwhile, the photocurrent has been maintained, rendering improved detectivity of 2.7 × 10 Jones. This approach enables efficient production of perovskite arrays, facilitating broader applications in perovskite electronics and optoelectronics.
随着金属卤化物钙钛矿及其光电器件的迅速发展,一种对材料友好且具有成本效益的图案化技术(通常是通过自上而下的方法)被强烈需求,以满足器件小型化和阵列形成的要求。在此,已开发出一种选择性剥离方法,用于对通过气相转化在云母上外延生长的晶圆级单晶PbI的有机卤化物蒸气中获得的高质量钙钛矿薄膜进行图案化。由于PbI的逐层转化,实现了钙钛矿-PbI垂直异质结构薄膜。利用层状PbI易于剥离的特性,将具有设计几何形状的预图案化PDMS压模应用于异质结构薄膜,在接触区域选择性地剥离下面的PbI片层,并在室温下无需额外处理即可实现顶部MAPbI层的精确图案化。通过Au电极对的层压集成了光电探测器阵列,通过MAPbI-PbI异质结构的能带排列和选择性剥离方法对台面的隔离来抑制暗电流;同时,光电流得以保持,使探测率提高到2.7×10琼斯。这种方法能够高效生产钙钛矿阵列,促进其在钙钛矿电子学和光电子学中的更广泛应用。