Li Binghui, Lin Yu-Sheng
School of Electronics and Information Technology, Sun Yat-Sen University Guangzhou 510006 China.
Sichuan University Chengdu 610207 China
Nanoscale Adv. 2025 Jun 24. doi: 10.1039/d5na00384a.
Electromagnetic metamaterials have supported the realization of various highly effective sensors for chemical and biological detection. However, their application in pressure sensing has rarely been discussed. In this paper, we present a terahertz (THz) spiral metamaterial (TSM) integrated with microelectromechanical system (MEMS) technology for pneumatic pressure sensing applications. To improve the performance of the measuring range, the geometrical parameters of the TSM device are discussed, and the perfect absorption is achieved at 2.055 THz. Based on deformable construction, the TSM device can be designed for pneumatic pressure sensors, and the sensing performance is characterized by the relationship between resonant frequency and fluid pressure. The results show that the sensitivity of the TSM device to pressure force is 75 GHz kPa. Meanwhile, the behavior of the TSM device exposed to an ambient environment with different refraction indices indicates its potential for biochemical sensing, and the sensitivity is up to 1.290 THz per RIU. These results offer a practical and compact multifunctional sensor for biochemical and pressure detection and open an avenue for applications in the field of THz optoelectronics.
电磁超材料有助于实现各种用于化学和生物检测的高效传感器。然而，它们在压力传感方面的应用却鲜有讨论。在本文中，我们展示了一种集成了微机电系统（MEMS）技术的太赫兹（THz）螺旋超材料（TSM），用于气压传感应用。为了提高测量范围的性能，我们讨论了TSM器件的几何参数，并在2.055太赫兹处实现了完美吸收。基于可变形结构，TSM器件可设计用于气压传感器，其传感性能通过共振频率与流体压力之间的关系来表征。结果表明，TSM器件对压力的灵敏度为75 GHz/kPa。同时，TSM器件在不同折射率的环境中的行为表明了其在生化传感方面的潜力，灵敏度高达每折射率单位（RIU）1.290太赫兹。这些结果为生化和压力检测提供了一种实用且紧凑的多功能传感器，并为太赫兹光电子学领域的应用开辟了一条道路。
