基于MEMS技术的电容式微机械超声换能器多阵列换能器驱动与检测技术研究
Research on Drive and Detection Technology of CMUT Multi-Array Transducers Based on MEMS Technology.
作者信息
Li Chenyuan, Chen Jiagen, Liu Chengwei, Xie Yao, Cui Yangyang, Zhang Shiwang, Li Zhikang, Zhao Libo, Chen Guoxing, Wei Shaochong, Gao Yu, Dong Linxi
机构信息
College of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China.
Suzhou Thermal Power Research Institute Co., Ltd., Suzhou 215004, China.
出版信息
Micromachines (Basel). 2025 May 22;16(6):604. doi: 10.3390/mi16060604.
This paper presents an ultrasonic driving and detection system based on a CMUT array using MEMS technology. Among them, the core component CMUT array is composed of 8 × 8 CMUT array elements, and each CMUT array element contains 6 × 6 CMUT units. The collapse voltage of a single CMUT unit obtained through finite element analysis is 95.91 V, and the resonant frequency is 3.16 MHz. The driving section achieves 64-channel synchronous driving, with key parameters including an adjustable excitation signal frequency ranging from 10 kHz to 5.71 MHz, a delay precision of up to 1 ns, and an excitation duration of eight pulse cycles. For the echo reception, a two-stage amplification circuit for high-frequency weak echoes with 32 channels was designed, achieving a gain of 113.72 dB and -3 dB bandwidth of 3.89 MHz. Simultaneously, a 32-channel analog-to-digital conversion based on a self-calibration algorithm was implemented, with a sampling rate of 50 Mbps and a data width of 10 bits. Finally, the experimental results confirm the successful implementation of the driving system's designed functions, yielding a center frequency of 1.4995 MHz and a relative bandwidth of 127.9%@-6 dB for the CMUT operating in silicone oil. This paper successfully conducted the transmit-receive integrated experiment of the CMUT and applied Butterworth filtering to the echo data, resulting in high-quality ultrasonic echo signals that validate the applicability of the designed CMUT-based system for ultrasonic imaging.
本文提出了一种基于微机电系统(MEMS)技术的电容式微机械超声换能器(CMUT)阵列的超声驱动与检测系统。其中,核心部件CMUT阵列由8×8个CMUT阵列单元组成,每个CMUT阵列单元包含6×6个CMUT单元。通过有限元分析得到单个CMUT单元的击穿电压为95.91V,谐振频率为3.16MHz。驱动部分实现了64通道同步驱动,关键参数包括可调激励信号频率范围为10kHz至5.71MHz、延迟精度高达1ns以及激励持续时间为八个脉冲周期。对于回波接收,设计了一种用于32通道高频微弱回波的两级放大电路,增益为113.72dB,-3dB带宽为3.89MHz。同时,实现了基于自校准算法的32通道模数转换,采样率为50Mbps,数据宽度为10位。最后,实验结果证实了驱动系统设计功能的成功实现,对于在硅油中工作的CMUT,其中心频率为1.4995MHz,-6dB相对带宽为127.9%。本文成功进行了CMUT的收发一体化实验,并对回波数据应用了巴特沃斯滤波,得到了高质量的超声回波信号,验证了所设计的基于CMUT的系统在超声成像中的适用性。
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