Nedyalkov Nikolay, Stankova Nadya, Padikova Fatme, Valkov Stefan, Atanasova Genoveva, Dilova Tina, Aleksandrov Lyubomir
Institute of Electronics, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee, 1784 Sofia, Bulgaria.
Center of Competence "Smart Mechatronic, Eco-and Energy-Saving Systems and Technologies", Technical University of Gabrovo, 5300 Gabrovo, Bulgaria.
Materials (Basel). 2025 Jun 17;18(12):2861. doi: 10.3390/ma18122861.
The purpose of this work is to demonstrate that laser-induced conductive tracts in AlN ceramic can be applied for fabrication of an integrated resistive heating element. Nanosecond laser processing at a wavelength of 1064 nm of ceramic in vacuum is used for a formation of conductive areas. It is demonstrated that the applied laser fluence and the number of pulses influence strongly the electrical properties of the material in the irradiated zone. The resistance value of the produced tracks with a length of about 4 mm and width of about 1 mm may vary from 17 to about 2000 Ohms, depending on the processing conditions. The material in the processed zone is characterized by means of surface composition, morphology, and electric properties. It is found that the electrical conductivity of the formed structure is based on the ceramic decomposition and formation of aluminum layer. The analysis of the influence of the temperature on the electrical resistance value shows that the material's conductivity could be preserved after annealing, as in the present study it is confirmed up to 300 °C. The ability of the formed tracks to serve as a basis element of ceramic integrated resistive heater is studied by applying DC voltage. It is found that the fabricated element can be used with a high reliability to about 90 °C without special requirements for contact design and encapsulation. Operation at higher temperatures is also demonstrated as the maximal one achieved is about 150 °C at 10V. The performance of the heater is investigated and discussed as the operation range is defined. The proposed element can be a basis for a design of an integrated heater in ceramic with high stability and applications in everyday life and research.
这项工作的目的是证明在AlN陶瓷中激光诱导的导电通道可用于制造集成电阻加热元件。在真空中对陶瓷进行波长为1064 nm的纳秒激光加工，以形成导电区域。结果表明，所施加的激光能量密度和脉冲数对辐照区域内材料的电学性能有很大影响。长度约为4 mm、宽度约为1 mm的生成轨迹的电阻值可能在17至约2000欧姆之间变化，这取决于加工条件。通过表面成分、形貌和电学性能对加工区域内的材料进行表征。发现形成结构的电导率基于陶瓷分解和铝层的形成。对温度对电阻值影响的分析表明，退火后材料的导电性可以保留，在本研究中，高达300°C时得到了证实。通过施加直流电压研究了形成的轨迹作为陶瓷集成电阻加热器基础元件的能力。发现制造的元件在对接触设计和封装没有特殊要求的情况下，可在高达约90°C的温度下高可靠性地使用。在更高温度下的运行也得到了证明，在10V电压下实现的最高温度约为150°C。随着运行范围的确定，对加热器的性能进行了研究和讨论。所提出的元件可以作为设计具有高稳定性的陶瓷集成加热器的基础，并可应用于日常生活和研究中。
