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用于高灵敏度触觉传感的具有花状微结构的超薄复合膜的无模具制造

Mold-Free Manufacturing of Ultra-Thin Composite Film with Flower-like Microstructures for Highly Sensitive Tactile Sensing.

作者信息

Zhao Xin-Hua, Liu Ling-Feng, He Qinyu, Sun Qi-Jun

机构信息

School of Intelligent Manufacturing and Electrical Engineering, Guangzhou Institute of Science and Technology, Guangzhou 510540, China.

School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China.

出版信息

Materials (Basel). 2025 Jun 17;18(12):2863. doi: 10.3390/ma18122863.

DOI:10.3390/ma18122863
PMID:40572992
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12195031/
Abstract

Wearable tactile sensors with high sensitivity can be potentially used to continuously monitoring physiological signals that are closely related to disease diagnosis and health condition tracking. However, the development of such tactile sensors involves a number of challenges, including a series of expensive patterning processes for microstructure manufacturing and addressing the large thickness of the microstructured composite film. Herein, a mold-free approach is presented to develop an ultra-thin ZnO/PEDOT:PSS composite film with flower-like microstructures via a feasible solution process for highly sensitive tactile sensors. The fabricated tactile sensors exhibit a high sensitivity of 4 × 10 kPa in the pressure range 0-10 kPa, a fast response to various pressures in merits of the hierarchical microstructures on top of the ultra-thin composite films. Thanks to the fascinating performance of the devices, the tactile sensors are demonstrated with the ability to monitor physiological signals, subtle human body motions, and spatial pressure distribution.

摘要

具有高灵敏度的可穿戴触觉传感器有可能用于连续监测与疾病诊断和健康状况跟踪密切相关的生理信号。然而,这种触觉传感器的开发面临诸多挑战,包括用于微结构制造的一系列昂贵的图案化工艺以及解决微结构复合膜的大厚度问题。在此,提出了一种无模具方法,通过可行的溶液工艺开发具有花状微结构的超薄ZnO/PEDOT:PSS复合膜,用于高灵敏度触觉传感器。所制备的触觉传感器在0-10 kPa的压力范围内表现出4×10 kPa的高灵敏度,由于超薄复合膜顶部的分级微结构,对各种压力具有快速响应。得益于器件的出色性能,该触觉传感器被证明具有监测生理信号、细微人体运动和空间压力分布的能力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/3ec62f1c8d6b/materials-18-02863-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/ca2042e20f6b/materials-18-02863-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/eca984f6ad8a/materials-18-02863-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/9cd0395d17d2/materials-18-02863-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/3ec62f1c8d6b/materials-18-02863-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/ca2042e20f6b/materials-18-02863-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/eca984f6ad8a/materials-18-02863-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/9cd0395d17d2/materials-18-02863-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78bb/12195031/3ec62f1c8d6b/materials-18-02863-g004.jpg

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