Wafer-Level Fabrication of Radiofrequency Devices Featuring 2D Materials Integration.

Two-dimensional (2D) materials have been proposed for use in a multitude of applications, with graphene being one of the most well-known 2D materials. Despite their potential to contribute to innovative solutions, the fabrication of such devices still faces significant challenges. One of the key challenges is the fabrication at a wafer-level scale, a fundamental step for allowing reliable and reproducible fabrication of a large volume of devices with predictable properties. Overcoming this barrier will allow further integration with sensors and actuators, as well as enabling the fabrication of complex circuits based on 2D materials. This work presents the fabrication steps for a process that allows the on-wafer fabrication of active and passive radiofrequency (RF) devices enabled by graphene. Two fabrication processes are presented. In the first one, graphene is transferred to a back gate surface using critical point drying to prevent cracks in the graphene. In the second process, graphene is transferred to a flat surface planarized by ion milling, with the gate being buried beneath the graphene. The fabrication employs a damascene-like process, ensuring a flat surface that preserves the graphene lattice. RF transistors, passive RF components, and antennas designed for backscatter applications are fabricated and measured, illustrating the versatility and potential of the proposed method for 2D material-based RF devices. The integration of graphene on devices is also demonstrated in an antenna. This aimed to demonstrate that graphene can also be used as a passive device. Through this device, it is possible to measure different backscatter responses according to the applied graphene gating voltage, demonstrating the possibility of wireless sensor development. With the proposed fabrication processes, a flat graphene with good quality is achieved, leading to the fabrication of RF active devices (graphene transistors) with intrinsic f and f of 14 GHz and 80 GHz, respectively. Excellent yield and reproducibility are achieved through these methods. Furthermore, since the graphene membranes are grown by Chemical Vapor Deposition (CVD), it is expected that this process can also be applied to other 2D materials.