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基于微流体结构的双功能太赫兹超材料吸波器

Dual-function terahertz metamaterial absorber based on microfluidic structures.

作者信息

Ge Hongyi, Jia Keke, Jiang Yuying, Bu Yuwei, Zhang Yujie, Zhang Yuan, Sun Qingcheng

出版信息

Opt Express. 2025 Feb 10;33(3):3930-3949. doi: 10.1364/OE.548058.

Abstract

In recent years, terahertz metamaterial sensors have shown great potential in label-free biosensing; yet, the detection of high-absorption liquid samples that are sensitive to terahertz waves remains a significant challenge. In this study, a dual-function absorber capable of dynamically switching between broadband absorption and high-sensitivity sensing is proposed based on the microfluidic technology and phase change characteristics of vanadium dioxide (VO). Compared with traditional terahertz microfluidic sensors, this structure differs in that it incorporates a VO film as a separation layer in the sensor cover plate and a VO square resonator on top. This configuration not only exhibits high-sensitivity sensing but can also function as an absorber for broadband absorption. When VO is in the metallic state, the structure acts as a broadband absorber with an absorption rate exceeding 90% across the 1.09-3.02 THz range. When VO is in the insulating state, the structure functions as a microfluidic sensor, achieving an absorption rate above 99.9% at 1.438 and 2.068 THz, with nearly perfect absorption and refractive index sensitivities of 532 and 785 GHz/RIU, respectively; the quality factor is 17.6 and 23.5, respectively, indicating excellent sensing performance. Moreover, due to the symmetry of the metal micro-structured layer and the VO square resonator, the device exhibits polarization insensitivity and stability at large incident angles. In summary, this structure significantly broadens the applications of traditional absorbers and sensors and holds promise for future applications in electromagnetic cloaking, energy harvesting, and biomedical detection.

摘要

近年来,太赫兹超材料传感器在无标记生物传感方面展现出巨大潜力;然而,对太赫兹波敏感的高吸收液体样品的检测仍然是一项重大挑战。在本研究中,基于二氧化钒(VO₂)的微流控技术和相变特性,提出了一种能够在宽带吸收和高灵敏度传感之间动态切换的双功能吸收器。与传统太赫兹微流控传感器相比,该结构的不同之处在于,它在传感器盖板中包含一个VO₂薄膜作为分离层,并在顶部设置了一个VO₂方形谐振器。这种配置不仅具有高灵敏度传感功能,还能作为宽带吸收的吸收器。当VO₂处于金属态时,该结构在1.09 - 3.02 THz范围内作为宽带吸收器,吸收率超过90%。当VO₂处于绝缘态时,该结构作为微流控传感器,在1.438和2.068 THz处的吸收率高于99.9%,吸收灵敏度和折射率灵敏度分别接近完美,为532和785 GHz/RIU;品质因数分别为17.6和23.5,表明具有优异的传感性能。此外,由于金属微结构层和VO₂方形谐振器的对称性,该器件在大入射角下表现出偏振不敏感性和稳定性。综上所述,这种结构显著拓宽了传统吸收器和传感器的应用范围,并有望在电磁隐身、能量收集和生物医学检测等未来应用中发挥作用。

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