• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

低能碳离子辐照诱导热处理Ni/Si双层膜中的相演变

Low-energy carbon ion irradiation-induced phase evolution in thermally treated Ni/Si bilayers.

作者信息

Shah Khushboo, Pandey Ratnesh, Devi Devarani, Ojha Sunil, Gupta Mukul, Maity Gurupada, Kumar Sanjeev, Dubey Santosh

机构信息

Department of Physics, School of Advanced Engineering, UPES Dehradun 248001 India

Inter University Accelerator Centre (IUAC) Vasant Kunj Delhi 110067 India.

出版信息

RSC Adv. 2025 Aug 8;15(34):28285-28297. doi: 10.1039/d5ra04171f. eCollection 2025 Aug 1.

DOI:10.1039/d5ra04171f
PMID:40861289
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12377182/
Abstract

In this paper, we report the effect of low-energy carbon ion irradiation on the thermally annealed nickel-silicon bilayer samples. The primary objective is to analyse and interpret the formation of various nickel silicide phases, their evolution, and stability under ion irradiation. The bilayer samples were fabricated using magnetron sputtering at room temperature, with a 100 nm nickel top layer and a 100 nm silicon buffer layer deposited on a silicon substrate. The deposition was carried out under a base pressure of 7.02 × 10 mbar and a gas pressure of 4.14 × 10 mbar. These samples were then annealed at 500 °C for one hour in an argon atmosphere to nucleate various nickel-silicide phases. Ion irradiation was carried out using carbon ions of energy 120 keV for two different fluences 3 × 10 and 1 × 10 ions per cm. Grazing Incidence X-Ray Diffraction (GIXRD), Transmission Electron Microscopy (TEM), and Rutherford Backscattering Spectroscopy (RBS) techniques were employed to characterize the resulting phases in the thin films. The findings indicate that low-energy irradiation of pre-annealed and unannealed Ni/Si bilayer samples results in significant structural modifications, which are further confirmed by TEM analysis.

摘要

在本文中，我们报道了低能碳离子辐照对热退火镍 - 硅双层样品的影响。主要目的是分析和解释各种镍硅化物相的形成、它们的演变以及在离子辐照下的稳定性。双层样品在室温下通过磁控溅射制备，在硅衬底上沉积了100纳米厚的镍顶层和100纳米厚的硅缓冲层。沉积在7.02×10毫巴的基压和4.14×10毫巴的气压下进行。然后将这些样品在氩气气氛中于500°C退火一小时以形成各种镍硅化物相。使用能量为120 keV的碳离子对两种不同通量（每平方厘米3×10和1×10离子）进行离子辐照。采用掠入射X射线衍射（GIXRD）、透射电子显微镜（TEM）和卢瑟福背散射光谱（RBS）技术对薄膜中形成的相进行表征。结果表明，对预退火和未退火的Ni/Si双层样品进行低能辐照会导致显著的结构改性，这通过TEM分析得到进一步证实。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/60706ffd0f84/d5ra04171f-f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/234a8640b5c8/d5ra04171f-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/f0d2d9602736/d5ra04171f-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/c77c9f1aec1e/d5ra04171f-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/6b8819bea7d8/d5ra04171f-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/b1def6fb60c3/d5ra04171f-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/b7d6f601fbad/d5ra04171f-f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/f53e4bb2b094/d5ra04171f-f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/60706ffd0f84/d5ra04171f-f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/234a8640b5c8/d5ra04171f-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/f0d2d9602736/d5ra04171f-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/c77c9f1aec1e/d5ra04171f-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/6b8819bea7d8/d5ra04171f-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/b1def6fb60c3/d5ra04171f-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/b7d6f601fbad/d5ra04171f-f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/f53e4bb2b094/d5ra04171f-f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c072/12377182/60706ffd0f84/d5ra04171f-f8.jpg

相似文献

1
Low-energy carbon ion irradiation-induced phase evolution in thermally treated Ni/Si bilayers.低能碳离子辐照诱导热处理Ni/Si双层膜中的相演变
RSC Adv. 2025 Aug 8;15(34):28285-28297. doi: 10.1039/d5ra04171f. eCollection 2025 Aug 1.
2
Prescription of Controlled Substances: Benefits and Risks管制药品的处方：益处与风险
3
Management of urinary stones by experts in stone disease (ESD 2025).结石病专家对尿路结石的管理（2025年结石病专家共识）
Arch Ital Urol Androl. 2025 Jun 30;97(2):14085. doi: 10.4081/aiua.2025.14085.
4
A Novel Design of a Portable Birdcage via Meander Line Antenna (MLA) to Lower Beta Amyloid (Aβ) in Alzheimer's Disease.一种通过曲折线天线（MLA）设计的便携式鸟笼，用于降低阿尔茨海默病中的β淀粉样蛋白（Aβ）。
IEEE J Transl Eng Health Med. 2025 Apr 10;13:158-173. doi: 10.1109/JTEHM.2025.3559693. eCollection 2025.
5
Electrophoresis电泳
6
A rapid mixed-methods evaluation of remote home monitoring models during the COVID-19 pandemic in England.英格兰 COVID-19 大流行期间远程家庭监护模式的快速混合方法评估。
Health Soc Care Deliv Res. 2023 Jul;11(13):1-151. doi: 10.3310/FVQW4410.
7
Systemic pharmacological treatments for chronic plaque psoriasis: a network meta-analysis.系统性药理学治疗慢性斑块状银屑病：网络荟萃分析。
Cochrane Database Syst Rev. 2021 Apr 19;4(4):CD011535. doi: 10.1002/14651858.CD011535.pub4.
8
Carbon dioxide detection for diagnosis of inadvertent respiratory tract placement of enterogastric tubes in children.用于诊断儿童肠胃管意外置入呼吸道的二氧化碳检测
Cochrane Database Syst Rev. 2025 Feb 19;2(2):CD011196. doi: 10.1002/14651858.CD011196.pub2.
9
The effect of sample site and collection procedure on identification of SARS-CoV-2 infection.样本采集部位和采集程序对严重急性呼吸综合征冠状病毒2（SARS-CoV-2）感染鉴定的影响。
Cochrane Database Syst Rev. 2024 Dec 16;12(12):CD014780. doi: 10.1002/14651858.CD014780.
10
Signs and symptoms to determine if a patient presenting in primary care or hospital outpatient settings has COVID-19.在基层医疗机构或医院门诊环境中，如果患者出现以下症状和体征，可判断其是否患有 COVID-19。
Cochrane Database Syst Rev. 2022 May 20;5(5):CD013665. doi: 10.1002/14651858.CD013665.pub3.

本文引用的文献

1
Influence of defect structure on colour tunability and magneto optical behaviour of WO nanoforms.缺陷结构对WO纳米形态的颜色可调性和磁光行为的影响。
RSC Adv. 2019 Jul 2;9(36):20536-20548. doi: 10.1039/c9ra01901d. eCollection 2019 Jul 1.
2
Reliable and cost effective design of intermetallic Ni2Si nanowires and direct characterization of its mechanical properties.金属间化合物Ni2Si纳米线的可靠且经济高效的设计及其力学性能的直接表征。
Sci Rep. 2015 Oct 12;5:15050. doi: 10.1038/srep15050.
3
The Scherrer equation versus the 'Debye-Scherrer equation'.
谢乐方程与“德拜-谢乐方程”
Nat Nanotechnol. 2011 Aug 28;6(9):534. doi: 10.1038/nnano.2011.145.
4
Microstructural investigation of nickel silicide thin films and the silicide-silicon interface using transmission electron microscopy.利用透射电子显微镜对硅化镍薄膜及硅化物-硅界面进行微观结构研究。
Micron. 2009 Jan;40(1):11-4. doi: 10.1016/j.micron.2008.01.012. Epub 2008 Feb 2.
5
Thermal-spike treatment of ion-induced grain growth: Theory and experimental comparison.
Phys Rev B Condens Matter. 1993 Feb 1;47(6):2983-2994. doi: 10.1103/physrevb.47.2983.