Microfilters by laser processing of bio-polymers.

Thin films of bio-polymers, such as polymethylmetacrylate, polytetrafluoroethylene, polyethylene-terephthalate and polyimide, are efficiently etched in air by UV laser pulses. A different sharp laser fluence threshold for significant etching is measured for each polymer. The thresholds are correlated to the chemical structure and to the wavelength-dependent absorption coefficient of the irradiated polymer. The polymers, having low absorption coefficients, show thresholds of the order of some J/cm2, about one magnitude higher than polymers having high absorption coefficients. Measurements on the polymer etching rates, in terms of removed molecules per eV at the used 347 nm wavelength, and a discussion on the laser-polymer interaction are presented. An interesting application of the laser ablation process to bio-polymers, concerning the ability to realize microfilters for the bio-medical field by irradiating the polymer surface through a perforated metal mask, is discussed.