Lange FF
The author is in the Materials Department, University of California, Santa Barbara, CA 93106, USA.
Science. 1996 Aug 16;273(5277):903-9. doi: 10.1126/science.273.5277.903.
Epitaxial thin films of inorganic single crystals can be grown on single-crystal substrates with a variety of different solution chemistries. This review emphasizes chemical solution deposition, in which a solution is used to deposit a layer of precursor molecules that decompose to low-density, polycrystalline films during heating. Ways to control film cracking during deposition and heat treatment and why many precursors synthesize metastable crystalline structures are discussed, and the different mechanisms that convert the polycrystalline film into a single crystal are reviewed. Hydrothermal epitaxy, in which single crystal thin films are directly synthesized on templating substrates in an aqueous solution at temperatures <150°C, is also discussed.
无机单晶的外延薄膜可以通过多种不同的溶液化学方法在单晶衬底上生长。本综述重点介绍化学溶液沉积，即使用溶液沉积一层前驱体分子，这些分子在加热过程中分解形成低密度的多晶薄膜。讨论了在沉积和热处理过程中控制薄膜开裂的方法，以及许多前驱体合成亚稳晶体结构的原因，并综述了将多晶薄膜转化为单晶的不同机制。还讨论了水热外延，即在温度低于150℃的水溶液中在模板衬底上直接合成单晶薄膜的方法。
